Opto-Electronic Engineering, Volume. 48, Issue 4, 200430(2021)
Micro/Nano profile measurement by structured illumination microscopy utilizing time-domain phase-shift technique
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Fan Songru, Fan Meng, Chen Donghui, Zhao Qing. Micro/Nano profile measurement by structured illumination microscopy utilizing time-domain phase-shift technique[J]. Opto-Electronic Engineering, 2021, 48(4): 200430
Paper Information
Category: Article
Received: Nov. 18, 2020
Accepted: --
Published Online: Sep. 4, 2021
The Author Email: Songru Fan (songruf166@vip.163.com)
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