Design of Large Field of View and High Numerical Aperture Microscope Objective

Table 1. Objective specification comparison
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Table 1. Objective specification comparison
Parameter Nanoscribe Olympus ZEISS Our project
NA 1.4 0.8 1.3 1.3 1.3
Mag. 63× 25× 100× 100× 100×
W.D. 0.36 0.38 0.2 0.2 0.5
F.D. 0.28 0.7 0.265 0.23 1.00
C.G. — — 0.17 0.17 —
nd 1.515 1.515 1.515 1.515 1.522
vd — — 40.8 41.58 34.1

Table 2. Objective design specs
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Table 2. Objective design specs
Parameter Spec
Spectral range /nm 532-780
Objective field number 1.0
Numerical aperture ≥1.3
Working distance ≥0.5
Total length <250
RMS of wavefront error /λ 0.09
Distortion /% <0.5

Table 3. Comparison of various microscope objectives
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Table 3. Comparison of various microscope objectives
Magnification NA Number of lens NA·y （NA）²·y
10× 0.22 4 0.176 0.039
20× 0.49 5 0.196 0.096
47.5× 0.91 7 0.153 0.139
98× 1.28 7 0.104 0.134

Table 4. Specs of designed objective

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Table 4. Specs of designed objective

Parameter	Spec
Spectral range /nm	532-780
Effective focal length	7.5
Half field of view /（°）	4.2
Objective field number	1.0
Numerical aperture	1.316
Working distance	0.5
Total length	231.1
RMS of wavefront error /λ	0.05
Distortion /%	0.21
Number lens element	27

Table 5. Alignment tolerances
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Table 5. Alignment tolerances
Item Value
Airspce 0.005-0.01
Tilt /rad 0.00007-0.00029
Decenter 0.003-0.01

Table 6. Compensator range
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Table 6. Compensator range
Item Value
Defocus of image surface 0.001
Lens 13（X direction） 0.0105
Lens 13（Y direction） 0.0175
Lens 25（X direction） 0.0434
Lens 25（Y direction） 0.0505

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Muwang Huang, Xu Liu, Faguan Lin. Design of Large Field of View and High Numerical Aperture Microscope Objective[J]. Laser & Optoelectronics Progress, 2023, 60(5): 0518001

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