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Chinese Optics Letters, Volume. 5, Issue 3, 164(2007)

Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement

[in Chinese]1,2, [in Chinese]1, [in Chinese]3, and [in Chinese]1
Author Affiliations
  • 1Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
  • 2Graduate School of the Chinese Academy of Sciences, Beijing 100039
  • 3Shanghai Hengyi Optics and Fine Mechanics Co., Ltd., Shanghai 201800
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    [12] [12] X. Wang, O. Sasaki, T. Suzuki, and T. Maruyama, Appl. Opt. 39, 4593 (2000).

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    [14] [14] Y. Liu and X. Wang, Chin. J. Lasers (in Chinese) 33, 1574 (2006).

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    CLP Journals

    [1] He Guotian, Zeng Zhi, Li Ming. Real-Time Surface Profile Measurement in a Laser Diode Interferometer Insensitive to Disturbance[J]. Acta Optica Sinica, 2009, 29(s1): 216

    [2] Jingjing Wang, Xiaobo Wang, Bo He, Liantuan Xiao, Suotang Jia, "Phase-locked laser coherent interference," Chin. Opt. Lett. 9, 091404 (2011)

    [3] Haihua Cui, Wenhe Liao, Xiaosheng Cheng, Ning Dai, Tianran Yuan, "A three-step system calibration procedure with error compensation for 3D shape measurement," Chin. Opt. Lett. 8, 33 (2010)

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], "Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement," Chin. Opt. Lett. 5, 164 (2007)

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    Paper Information

    Received: Oct. 25, 2006

    Accepted: --

    Published Online: Mar. 12, 2007

    The Author Email:

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology