Researching | Influence of Water Jet Assisted Laser Processing Silicon Carbide

Laser & Optoelectronics Progress, Volume. 56, Issue 1, 011405(2019)

Influence of Water Jet Assisted Laser Processing Silicon Carbide

Xuehui Chen^*, Xiang Li, Chao Wu, and Yao Zhang

Author Affiliations

College of Mechanical and Electrical Engineering, Anhui Jianzhu University, Hefei, Anhui 230601, China

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References (13)

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References(13)

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[2] Maboudian R, Carraro C, Senesky D G et al. Advances in silicon carbide science and technology at the micro- and nanoscales[J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 31, 050805(2013). http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6526947

[3] Luo Y, Wu X B, Zhou Y et al. Interaction between excimer laser and SiC ceramic[J]. Laser & Optoelectronics Progress, 53, 121403(2016).

[4] Zhang H Z, Huang T, Xiao R S. Nanosecond pulsed fiber laser ablation of SiCp/Al composite materials[J]. Chinese Journal of Lasers, 44, 0102017(2017).

[5] Sun D, Wang J H, Han F Z. Contrastivestudy of water jet guided laser and water jet assisted laser cutting of monocrystalline silicon[J]. Applied Laser, 36, 723-727(2016).

[6] Chen X H, Yuan G F, Zheng W. Experimental investigation of water jet-assisted laser etching on Al2O3 ceramics[J]. China Mechanical Engineering, 24, 1568-1571(2013).

[7] Sun S F, Shao Y. Water-assisted laser induced plasma backside etching of pyrex7740 glass[J]. Laser & Optoelectronics Progress, 54, 101404(2017).

[8] Mullick S, Madhukar Y K, Roy S et al. An investigation of energy loss mechanisms in water-jet assisted underwater laser cutting process using an analytical model[J]. International Journal of Machine Tools and Manufacture, 91, 62-75(2015). http://www.sciencedirect.com/science/article/pii/S0890695515300109

[9] Zhai Z W. Experimental study and numerical simulation of low-pressure jet-assisted laser etching[D]. Wuxi: Jiangnan University(2014).

[10] Kong L R, Zhang F, Duan J et al. Research on water-assisted laser etching of alumina ceramics[J]. Laser Technology, 38, 330-334(2014).

[11] Tangwarodomnukun V, Wang J, Huang C Z et al. An investigation of hybrid laser-waterjet ablation of silicon substrates[J]. International Journal of Machine Tools and Manufacture, 56, 39-49(2012). http://www.sciencedirect.com/science/article/pii/S089069551200003X

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Xuehui Chen, Xiang Li, Chao Wu, Yao Zhang. Influence of Water Jet Assisted Laser Processing Silicon Carbide[J]. Laser & Optoelectronics Progress, 2019, 56(1): 011405

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Paper Information

Category: Lasers and Laser Optics

Received: Jun. 27, 2018

Accepted: Jul. 24, 2018

Published Online: Aug. 1, 2019

The Author Email: Xuehui Chen (xhenxh@163.com)

DOI:10.3788/LOP56.011405

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology