Laser Technology, Volume. 49, Issue 4, 484(2025)

Fabrication of optics waveguide device using femtosecond lasers

Jiaqi WANG, Di SONG, Zhaopeng QIN, Juhong HAN, Yalan WANG, Jia CHENG, Chenghuan SU, and You WANG
References(14)

[5] [5] WU J M. Investigation on fabrication of waveguides and directional couplers in BK7 glass by femtosecond laser direct writing[D]. Ji’nan: Shandong University, 2021 (in Chinese).

[12] [12] BOULESBAA M, HATHAT M E, BOUNEGAB A, et al. Improvement of optical characteristics of silicon based 1 × 3 beam splitter with photonic crystal waveguide[C]//AIP Conference Proceedings. Kuala Lumpur, Malaysia: AIP Publishing, 2022: 020001.

[32] [32] BAI J. Research on the technique of femtosecond laser inscription of waveguide and its application[D]. Xi’an: Xi’an Institute of Optics and Precision Mechanics of CAS, 2014 (in Chinese).

[34] [34] ZHANG L M. Femtosecond laser inscription optical waveguide in crystal: Fabrication, properties and application research[D]. Ji’nan: Shandong Normal University, 2019 (in Chinese).

[35] [35] LAI Sh Y. The ablation and surface modification mechanisms of pulsed laser interaction with optical materials[D]. Nanjing: Nanjing University of Science and Technology, 2020 (in Chinese).

[38] [38] LU J, TIAN J, POUMELLEC B, et al. Tailoring chiral optical properties by femtosecond laser direct writing in silica[J]. Light: Science & Applications, 2023, 12(1): 46.

[41] [41] TERAKAWA M. Femtosecond laser direct writing[C]//Micro and Nano Fabrication Technology. Berlin, Germany : Springer, 2018: 481-498.

[48] [48] YIN J, QU Ch Y, ZHANG M L, et al. Gain characteristics of polymer waveguide amplifiers based on Er3+ , Yb3+ Co-doped nanocrystals[J]. Acta Optica Sinica, 2015, 35(12): 1213001(in Chinese).

[52] [52] FAN Z X. Fabrication of optical waveguide in LiNbO3 by femto-second laser and its transmission characteristics[D]. Mianyang: Southwest University of Science and Technology, 2016 (in Chinese).

[53] [53] LIU H L. Femtosecond laser inscribed optical channel waveguides in laser crystals and ceramics[D]. Ji’nan: Shandong University, 2016 (in Chinese).

[60] [60] LIU Zh M, LIAO Y, FANG Z W, et al. Suppression of bend loss in writing of three-dimensional optical waveguides with femtosecond laser pulses[J]. Science China (Physica, Mechanica & Astronomica), 2018, 61(7): 070322.

[63] [63] LIU X Y. Experimental investigation of optical waveguides fabricated by femtosecond laser in glass and laser crystals[D]. Harbin: Harbin Institute of Technology, 2011 (in Chinese).

[73] [73] MAZZERA M, CORRIELLI G, SERI A, et al. An integrated optical memory based on laser written waveguides[C]//2016 Conference on Lasers and Electro-Optics (CLEO). New York, USA: IEEE Press, 2016: 09288.

[79] [79] LI Y Ch, XIAO K H, LI Zh T, et al. Femtosecond laser direct writing of bent waveguides with high curvature and low loss[J]. Chinese Journal of Lasers, 2023, 51(16): 1602403 (in Chinese).

Tools

Get Citation

Copy Citation Text

Jiaqi WANG, Di SONG, Zhaopeng QIN, Juhong HAN, Yalan WANG, Jia CHENG, Chenghuan SU, You WANG. Fabrication of optics waveguide device using femtosecond lasers[J]. Laser Technology, 2025, 49(4): 484

Download Citation

EndNote(RIS)BibTexPlain Text
Save article for my favorites
Paper Information

Category:

Received: Sep. 6, 2024

Accepted: --

Published Online: Aug. 28, 2025

The Author Email:

DOI:10.7510/jgjs.issn.1001-3806.2025.04.002

Topics