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Chinese Journal of Lasers, Volume. 33, Issue suppl, 427(2006)

Voltage Decoupling of Micromachined Membrane Deformable Mirror

[in Chinese]1,2、*, [in Chinese]1, and [in Chinese]1
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    [in Chinese], [in Chinese], [in Chinese]. Voltage Decoupling of Micromachined Membrane Deformable Mirror[J]. Chinese Journal of Lasers, 2006, 33(suppl): 427

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    Paper Information

    Category: laser manufacturing

    Received: --

    Accepted: --

    Published Online: Apr. 21, 2006

    The Author Email: (li_ende@yahoo.com.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology