Fitting Model of Laser-Induced Damage Threshold for Optical Elements with Periodic Surface

Yuan Li; Junhong Su; Junqi Xu; Lihong Yang; Guoliang Yang

doi:10.3788/LOP202259.2320001

Laser & Optoelectronics Progress, Volume. 59, Issue 23, 2320001(2022)

Fitting Model of Laser-Induced Damage Threshold for Optical Elements with Periodic Surface

Yuan Li, Junhong Su^*, Junqi Xu, Lihong Yang, and Guoliang Yang

Shaanxi Province Key Laboratory of Thin Film Technology and Optical Test, College of Opto-Electronic Engineering, Xi'an Technological University, Xi'an 710021, Shaanxi , China

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Figures & Tables(6)

Fig. 1. SEM micrographs of optical element with periodic surface. (a) Top view; (b) cross-sectional view

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Fig. 2. Schematic diagram of LIDT test system for optical elements

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Fig. 3. Fitting result of laser-induced damage threshold

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Table 1. Calculation results of damage probability

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Table 1. Calculation results of damage probability

Item	n
Item	1	2	3	4	5	6	7	8	9	10
Calculated range of energy /mJ	71.25	76	80.75	85.5	90.25	95	99.75	104.5	109.25	114
	-	-	-	-	-	-	-	-	-	-
	78.75	84	89.25	94.5	99.75	105	110.25	115.5	120.75	126
Standard fluence p /mJ	14.93	15.92	16.92	17.91	18.91	19.90	20.90	21.89	22.89	23.89
${\bar{L}}_{i}$ /（J·cm^-2）	14.81	15.99	16.95	18.02	18.83	19.96	20.77	21.81	23.97	24.38
u（p_i） /mJ	0.118	-0.066	-0.031	-0.106	0.079	-0.056	0.130	0.085	-1.080	-0.495
Damage fraction probability	1/8	2/11	4/15	5/23	5/19	6/16	7/16	6/13	4/9	5/8
k_i	8	11	15	23	19	16	16	13	9	8
P /%	12.5	18.2	26.7	21.7	26.3	37.5	43.8	46.2	44.4	62.5

Table 2. Calculation results of energy density uncertainty for linear fitting
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Table 2. Calculation results of energy density uncertainty for linear fitting
Item Uncertainty
s（b） 0.343
s（L） 0.429
u_crel（L_th） /% 2.630

Table 3. Calculation results of LIDT uncertainties of linear fitting two-dimensional periodic structure thin films
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Table 3. Calculation results of LIDT uncertainties of linear fitting two-dimensional periodic structure thin films
Item Uncertainty
u_crel²（q） /% 0
u_crel²（L_th） /% 0.029
u_crel²（L_th） /% 0.069
u_crel（F_th） /% 3.13
c=2，LIDT /（J·cm^-2） 13.06±6.26%
c=3，LIDT /（J·cm^-2） 13.06±9.39%

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Yuan Li, Junhong Su, Junqi Xu, Lihong Yang, Guoliang Yang. Fitting Model of Laser-Induced Damage Threshold for Optical Elements with Periodic Surface[J]. Laser & Optoelectronics Progress, 2022, 59(23): 2320001

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