Fig. 1. SEM diagram of SiO₂ thin films
(a): On Si/Al substrate; (b): On Si substrate

Fig. 2. Schematic diagram of experimental setup for measuring thermal radiation with FTIR

Fig. 3. Thermal radiation experimental spectra of (a) Si/Al/SiO₂ thin films and (c) Si/SiO₂ thin films in the normal incident; Simulation spectra of reflection (black solid line), transmission (red solid line) and absorption (blue solid line) of (b) Si/Al/SiO₂ thin films and (d) Si/SiO₂ thin films in the normal incidence

Fig. 4. Thermal radiation angle diagram of two kinds of polarizations at the incident angle of 0°~70° for Si/Al/SiO₂thin films
(a): Under P polarization; (b): Under S polarization