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Chinese Journal of Lasers, Volume. 32, Issue 3, 389(2005)

Method of Heterodyne Confocal Microscopy Measuring Big Step Height

[in Chinese]1、*, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]2, and [in Chinese]2
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Method of Heterodyne Confocal Microscopy Measuring Big Step Height[J]. Chinese Journal of Lasers, 2005, 32(3): 389

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    Paper Information

    Category: Measurement and metrology

    Received: Nov. 15, 2003

    Accepted: --

    Published Online: Jun. 1, 2006

    The Author Email: (yanjuqun@tsinghua.org.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology