Chinese Journal of Lasers, Volume. 48, Issue 8, 0802020(2021)
Application of Ultrafast Lasers in the Manufacture of Passive Optical Waveguide Devices: A Review
Figures & Tables(7)
![Several achievements of ultrafast laser manufacturing of optical path converters. (a) Waveguide illumination using 90°-shaped waveguide[17]; (b) sinusoidal-curve-shaped waveguide with different periods and amplitudes and their guiding losses[18]; (c) rounded-rectangle-shaped waveguides and the distribution of refractive index of their cross-section before and after annealing[19]; (d) right-angle-shaped waveguide and the near-field distribution of guiding beam[20]; (e) wave-like waveguide and its local morphology[21-22]; (f) 90°-shaped and half-ring-shaped waveguides[23]; (g) influence of BLSWs on guiding losses[24]](/Images/icon/loading.gif){kind=icon}
Fig. 1. Several achievements of ultrafast laser manufacturing of optical path converters. (a) Waveguide illumination using 90°-shaped waveguide[17]; (b) sinusoidal-curve-shaped waveguide with different periods and amplitudes and their guiding losses[18]; (c) rounded-rectangle-shaped waveguides and the distribution of refractive index of their cross-section before and after annealing[19]; (d) right-angle-shaped waveguide and the near-field distribution of guiding beam[20]; (e) wave-like waveguide and its local morphology[21-22]; (f) 90°-shaped and half-ring-shaped waveguides[23]; (g) influence of BLSWs on guiding losses[24]
Fig. 2. Several achievements of ultrafast laser manufacturing of branched waveguides. (a) Symmetric 1×2 and 1×4 splitters and their performance under different wavelengths[25]; (b) symmetric 1×2, 1×3, and 1×4 splitters and their performance under different polarizations[26]; (c) transverse plane morphology of embedded cladding symmetric 1×2 splitter[27]; (d) transverse plane morphologies of symmetric 1×4 and 1×8 splitters[29]; (e) splitters with different branch angles and their performance under different wavelengths[30]; (f) symmetric 1×16 splitter and its performance under different polarizations obtained by simulations and experiments[31]
Fig. 3. Several achievements of ultrafast laser manufacturing of directional couplers. (a) Directional coupler within PMMA and its splitting ratio under different coupling lengths[33]; (b) directional couplers obtained by symmetric and asymmetric writing and their coupling ratio under different coupling lengths and input laser wavelengths[34]; (c) morphology and intensity distribution at output face of symmetric 2×2, 1×2, and 3×3 directional coupler[36]; (d) cross-sectional morphology of directional coupler within coreless fiber and the refractive index distribution of surrounding medium[37-38]
Fig. 4. Several achievements of ultrafast laser manufacturing of multimode interference waveguides. (a) Near-field pattern at multimode interference waveguide output[39]; (b) lobe distribution at multimode interference waveguide output with different heights at mode mixing region[40-41]; (c) morphology and light field distribution of multimode interference waveguide when working as refractive detector[42]
Fig. 5. Several achievements of ultrafast laser manufacturing of Fresnel lens. (a) Morphology of Fresnel lens with rough edge and void core[44]; (b) correlation between effective writing intensity and effective NA of Fresnel lens[45-46]; (c) morphology of Fresnel lens with different ring numbers and diameters as well as its effective focal length[47]; (d) morphology of Fresnel lens constructed by 70 concentric circles[48]; (e) cross-section and surface morphology of multi-layer Fresnel lens under different writing speeds[50]
Fig. 6. Several achievements of ultrafast laser manufacturing of microlens array. (a) Hump-like microlens array using a four-step fabrication technique and its focusing spot morphology[51-52]; (b) micro-crater-like microlens array using two-step fabrication technique[53]; (c) microlens array writed by holographic spot array[54]; (d) cylindrical microlens array fabricated by one-step ultrafast laser writing[55-57]
Table 1. Representative applications of ultrafast laser in the manufacture of passive optical waveguide devices
View tableTable 1. Representative applications of ultrafast laser in the manufacture of passive optical waveguide devices
Waveguide device Representative research team Prominent achievement Material Technology Device performance Optical converter Cheng Ya, from Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences Borosilicate glass[ 17 ]Ultrafast laser writing and ultrasonic ethanol bath Transmission loss 3--5 dB/cm@632.8 nm Fused silica[ 21 -22 ]Beam-shaped ultrafast laser writing, ultrasonic KOH etching and annealing Transmission efficiency 90%@632.8 nm Power splitter Beam splitter Chen Feng, from Shandong University LiNb Ultrafast laser writing 1×2 and 1×4 splitters, splitting angle 0.229°, transmission loss 3.4 dB/cm@632.8 nm KTiOAsO4 crystal[ 30 ]Ion implantation, ultrafast laser writing and annealing 1×2 splitter, minimum transmission loss 1.7 dB/cm@ 633 nm Directional coupler Watanabe W, from Osaka University PMMA[ 33 ]Slit assisted ultrafast laser writing Maximum refractive index change 4.6×10-4, transmission loss 4.2 dB/cm@632.8 nm Li Yan, from Peking University MgO-doped LiNb Beam-shaped ultrafast laser writing Maximum refractive index change 2.9×10-3, transmission loss 2.58 dB/cm(H mode), 1.63 dB/cm (V mode)@1550 nm Multimode interference waveguide Li Yan, from Peking University Fused silica[ 41 ]Ultrafast laser writing Maximum refractive index change of 2.5×10-3 Shu Xuewen, from Huazhong University of Science and Technology Single mode fiber[ 42 ]Ultrafast laser writing Refractive index 1.4484--1.4513, detection resolution 10675.9 nm/RIU Waveguide device Representative research team Prominent achievement Material Technology Device performance Waveguide lens Fresnel lens Kim J K, from Yonsei University Mode-expanded hybrid opticalfiber[ 46 ]Ultrafast laser ablation Controllable effective focal length Gilberto B, from University of Southampton Fused silica[ 49 ]Ultrafast Bessel laser writing Three layers structure, diffraction efficiency 52% Microlens array Jiang Lan, from Beijing University of Technology Photosensitive glass[ 51 ]Slit assisted ultrafast laser ablation, thermal treatment, ultrasonic HF bath, thermal bake Array area 150 μm× 150 μm, effective diameter of focal spot 6--8 μm Duan Ji'an, from Central South University Fused silica[ 55 ]Beam-shaped ultrafast laser writing Array area 5 mm×5 mm, effective NA higher than 0.35
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Ye Ding, Qiang Li, Jingyi Li, Lianfu Wang, Lijun Yang. Application of Ultrafast Lasers in the Manufacture of Passive Optical Waveguide Devices: A Review[J]. Chinese Journal of Lasers, 2021, 48(8): 0802020
Paper Information
Category: laser manufacturing
Received: Nov. 30, 2020
Accepted: Feb. 25, 2021
Published Online: Mar. 31, 2021
The Author Email: Li Qiang (1577014781@qq.com), Yang Lijun (yljtj@hit.edu.cn)
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