Research of Peak-Detection Algorithm Based on Absolute Wavelength Calibration of Excimer Laser

Jingchao Yuan; Jiangshan Zhao; Hui Li; Guangyi Liu

doi:10.3788/CJL201845.0701003

Chinese Journal of Lasers, Volume. 45, Issue 7, 0701003(2018)

Research of Peak-Detection Algorithm Based on Absolute Wavelength Calibration of Excimer Laser

Jingchao Yuan^1,2,3, Jiangshan Zhao^1,2、*, Hui Li^1,2, and Guangyi Liu^1,2

¹ Department of Projection Optics Technology, Academy of Opto-Electronics, Chinese Academy of Sciences,Beijing 100094, China

² Beijing Excimer Laser Technology and Engineering Center, Beijing 100094, China

³ University of Chinese Academy of Sciences, Beijing 100049, China

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Jingchao Yuan, Jiangshan Zhao, Hui Li, Guangyi Liu. Research of Peak-Detection Algorithm Based on Absolute Wavelength Calibration of Excimer Laser[J]. Chinese Journal of Lasers, 2018, 45(7): 0701003

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Paper Information

Category: laser devices and laser physics

Received: Dec. 26, 2017

Accepted: --

Published Online: Sep. 11, 2018

The Author Email: Zhao Jiangshan (zhaojiangshan@aoe.ac.cn)

DOI:10.3788/CJL201845.0701003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology