Fig. 1. Schematics of position relationship and motion types between workpiece and polishing lap. (a) Radial motion; (b) normal motion; (c) oblique motion

Fig. 2. Material removal rate distributions at different radial velocities. (a) 0; (b) 30 mm/s; (c) 40 mm/s; (d) 50 mm/s

Fig. 3. Material removal rate distributions at different normal velocities. (a) 0; (b) 40 mm/s; (c) 51 mm/s; (d) 65 mm/s

Fig. 4. Non-uniform material removal rate at different normal velocities

Fig. 5. Material removal rate distributions at different oblique velocities. (a) v_j=30 mm/s and v_f=30 mm/s; (b) v_j=30 mm/s and v_f=60 mm/s; (c) v_j=30 mm/s and v_f=90 mm/s; (d) v_j=40 mm/s and v_f=30 mm/s; (e) v_j=50 mm/s and v_f=30 mm/s; (f) v_j=60 mm/s and v_f=30 mm/s