Fig. 1. Three-dimensional structure of download type electro-optic modulator with reflection wall

Fig. 2. Sectional drawing of electro-optic modulator

Fig. 3. Structural diagram of photonic crystal nanowire cavity

Fig. 4. Circular hole parameter diagram

Fig. 5. Theoretical model of side coupling structure between mainline waveguide and resonant cavity

Fig. 6. Theoretical transmittance spectrum of side coupling structure between mainline waveguide and resonant cavity

Fig. 7. Doping diagram of electro-optic modulator silicon-based materials

Fig. 8. Carrier concentration distributions when modulation voltage is 1.2 V. (a) N type carrier concentration;(b) P type carrier concentration

Fig. 9. Transmissivity and resonance wavelength versus N_reflect

Fig. 10. Transmissivity and resonance wavelength versus φ

Fig. 11. Transmissivity and Q value versus coupling distance L

Fig. 12. Stable light intensity distribution when incident wavelength is consistent with resonant wavelength

Fig. 13. Transmission spectra of modulator at “on” and “off” states

Fig. 14. Stable time at “on” state of modulator obtained by simulation calculation

Fig. 15. Stable time at “off” state of modulator obtained by simulation calculation

Fig. 16. 3 dB bandwidth of modulator obtained by simulation calculation

Fig. 17. Equivalent circuit of modulator