Piezoelectrics & Acoustooptics, Volume. 46, Issue 4, 486(2024)

High-Quality-Factor Quartz Crystal Microbalance Humidity Sensor Utilizing Porous Aluminum Oxide

PAN Yu... JIANG Shubo and CHEN Hui |Show fewer author(s)
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    References(9)

    [1] [1] NIE J, LIU J, MENG X. A new type of fast dew point sensor using quartz crystal without frequency measurement[J].Sensors and Actuators B: Chemical,2016, 236: 749-758.

    [2] [2] CHEN H, JIANG S, TAO F, et al. A novel capacitive low-humidity sensor based on a double-sided structure[J].IEEE Transactions on Instrumentation and Measurement, 2023, 72: 1-8.

    [3] [3] HUANG J Q, LI F, ZHAO M, et al. A surface micromachined CMOS MEMS humidity sensor[J].Micromachines,2015,6(10): 1569-1576.

    [4] [4] SONG H Q, ZHU X, YANG E, et al. A QCM humidity sensor based on MoS2 nanoflower-modified chitosan composite with high quality factor[J].IEEE Transactions on Electron Devices, 2023, 70(4): 1849-1853.

    [5] [5] YU X L, CHEN X, LI H, et al. A high-stability QCM humidity sensor coated with nanodiamond/multiwalled carbon nanotubes nanocomposite[J].IEEE Transactions on Nanotechnology, 2018, 17(3): 506-512.

    [6] [6] TANG K, CHEN X, DING X, et al. Highly sensitive QCM humidity sensor based on fullerenol-assisted dispersion of nafion/MWCNTs composites[J]. IEEE Sensors Journal, 2023, 23(11): 11547-11553.

    [7] [7] WEI Z, HU J, LI Y, et al. Effect of electrode thickness on quality factor of ring electrode QCM sensor[J]. Sensors, 2022, 22(14): 5159.

    [8] [8] HSIEH C L, LO P H, FANG W. Dual-layer nanoporous anodic aluminum oxide with embedded electrodes for capacitive relative humidity sensor[C]∥Barcelona, Spain:2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems,IEEE, 2013: 2572-2575.

    [9] [9] ALTUNTAS S, BUYUKSERIN F. Fabrication and characterization of conductive anodic aluminum oxide substrates[J]. Applied Surface Science, 2014, 318: 290-296.

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    PAN Yu, JIANG Shubo, CHEN Hui. High-Quality-Factor Quartz Crystal Microbalance Humidity Sensor Utilizing Porous Aluminum Oxide[J]. Piezoelectrics & Acoustooptics, 2024, 46(4): 486

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    Paper Information

    Received: Apr. 3, 2024

    Accepted: --

    Published Online: Sep. 18, 2024

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2024.04.012

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