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Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 220(2025)

Research on the Fabrication of Air-Gap Lateral Excitation XBAR Filters

SHU Ping, LI Hualin, LIANG Liuhong, TAN Fazeng, LENG Junlin, and CHEN Xing
Author Affiliations
  • The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China
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    SHU Ping, LI Hualin, LIANG Liuhong, TAN Fazeng, LENG Junlin, CHEN Xing. Research on the Fabrication of Air-Gap Lateral Excitation XBAR Filters[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 220

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    Paper Information

    Received: Dec. 7, 2024

    Accepted: Jun. 17, 2025

    Published Online: Jun. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.02.004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology