Piezoelectrics & Acoustooptics, Volume. 47, Issue 2, 220(2025)
Research on the Fabrication of Air-Gap Lateral Excitation XBAR Filters
The rapid development of communication technologies has created growing demand for high-frequency, miniaturized RF front-end filters. Among available solutions, the lateral excitation film bulk acoustic resonator(XBAR) represents an advanced technology specifically designed for high-frequency applications. Notably, air-gap XBAR structures demonstrate exceptional high-frequency performance owing to their unique architectural design. This study systematically investigates both the fabrication processes and structural characteristics of air-gap XBARs. Through this research, we successfully developed a functional air-gap transverse excitation thin-film bulk acoustic wave filter chip sample. Probe testing revealed that the fabricated device achieves a minimum insertion loss of 1.27 dB, with a passband bandwidth of 808 MHz and a relative passband bandwidth of 15.9%. These experimental results provide valuable reference data for ongoing research into high-frequency, large-bandwidth thin-film bulk acoustic wave filters.
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SHU Ping, LI Hualin, LIANG Liuhong, TAN Fazeng, LENG Junlin, CHEN Xing. Research on the Fabrication of Air-Gap Lateral Excitation XBAR Filters[J]. Piezoelectrics & Acoustooptics, 2025, 47(2): 220
Received: Dec. 7, 2024
Accepted: Jun. 17, 2025
Published Online: Jun. 17, 2025
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