[1] [1] Yang Huan, Huang Shan, Duan Jun, et al.. Contrastive study on laser ablation of single-crystal silicon by 1030 nm femtosecond laser and 355 nm nanosecond laser[J]. Chinese J Lasers, 2013, (1): 0103003.

[2] [2] Zhang Xuejiao, Ye Qing, Qu Ronghui, et al.. Research on damage on transparent elrctro- optic ceramic surface induced by nanosecond and femtosecond laser[J]. Chinese J Lasers, 2014, 41(7): 0706002.

[3] [3] Xia Bo, Jiang Lan, Wang Sumei, et al.. Femtosecond laser drilling of micro-holes[J]. Chinese J Lasers, 2013, 40(2): 0201001.

[4] [4] Gattass R R, Mazur E. Femtosecond laser micromachining in transparent materials[J]. Nature Photonics, 2008, 2(4): 219-225.

[5] [5] Bellouard Y, Said A, Dugan M, et al.. Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching[J]. Opt Express, 2004, 12(10): 2120-2129.

[6] [6] Li Y, Itoh K, Watanabe W, et al.. Three-dimensional hole drilling of silica glass from the rear surface with femtosecond laser pulses [J]. Opt Lett, 2001, 26(23): 1912-1914.

[7] [7] Zhu Z Q, Li G Q, Li J W, et al.. Self-driven flow in surface grooves fabricated by femtosecond laser[J]. Surf Coat Tech, 2014, 242: 246-250.

[8] [8] Hendricks F, der Au J A, Matylitsky V V. High aspect ratio microstructuring of transparent dielectrics using femtosecond laser pulses: method for optimization of the machining throughput[J]. Appl Phys A, 2014, 117(1): 149-153.

[9] [9] Yang Chengjuan, Mei Xuesong, Wang Wenjun, et al.. Femtosecond laser ablation on gold-chromium film[J]. Infrared and Laser Engineering, 2011, 40(1): 61-65.

[10] [10] Wu Dongjiang, Yao Longyuan, Ma Guangyi, et al.. Influence of polarization state on surface quality of femtosecond laser ablation quartz glass[J]. High Power Laser and Particle Beams, 2014, 26(2): 021006.

[11] [11] Zhao Qingliang, Jiang Tao, Dong Zhiwei, et al.. Ablation threshold and material removal mechanisms of SiC processed by femtosecond laser[J]. Journal of Mechanical Engineering, 2010, 46(21): 172-177.

[12] [12] Qi Litao, Hu Jinping, Yu Xinwei. Experimental study on femtosecond laser micromachining of microstructures on sapphire[J]. Journal of Heilongjiang Institute of Science & Technology, 2012, 22(3): 297-302.

[13] [13] Wang Yanshen, Wang Bo, Dong Shen, et al.. High-energy femtosecond laser induced collateral damage on silicon and glass[J]. Journal of Mechanical Engineering, 2006, 42(B5): 44-47.

[14] [14] Crawford T H R, Borowiec A, Haugen H K. Femtosecond laser micromachining of grooves in silicon with 800 nm pulses[J]. Appl Phys A, 2005, 80(8): 1717-1724.