Optics and Precision Engineering, Volume. 21, Issue 5, 1144(2013)

Optical element test with multiple surface interference

REN Huan1,2、*, MA Li1,2, LIU Xu2, HE Yong1, ZHENG Wan-gu2, and ZHU Ri-hong1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    CLP Journals

    [1] LIU Jiang, MIAO Er-long, QU Yi, SUI Yong-xin, YANG Huai-jiang. Measurement of optical surface based on intensity self-calibration phase-shift algorithm[J]. Optics and Precision Engineering, 2014, 22(8): 2007

    [2] ZHAO Wei-qian, LI Wen-yu, ZHAO Qi, QIU Li-rong, WANG Yun. Surface measurement by randomly phase shifting interferometry of measured element[J]. Optics and Precision Engineering, 2016, 24(9): 2167

    [3] ZHENG Chao, HE Qi, ZHOU Shi, YANG Shuai, CUI Jian, QIU Lirong. High-precision retractable PZT driving power technology for phase-shifting interferometry[J]. Optical Technique, 2021, 47(3): 321

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    REN Huan, MA Li, LIU Xu, HE Yong, ZHENG Wan-gu, ZHU Ri-hong. Optical element test with multiple surface interference[J]. Optics and Precision Engineering, 2013, 21(5): 1144

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    Paper Information

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    Received: Dec. 10, 2012

    Accepted: --

    Published Online: May. 31, 2013

    The Author Email: REN Huan (huandxj@yahoo.com.cn)

    DOI:10.3788/ope.20132105.1144

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