Evolution of AlN Step Bunching Morphology During High-Temperature Annealing

NIE Zikai; BEN Jianwei; ZHANG Entao; MA Xiaobao; ZHANG Shanli; SHI Zhiming; LYU Shunpeng; JIANG Ke; SUN Xiaojuan; LI Dabing

Journal of Synthetic Crystals, Volume. 52, Issue 6, 1016(2023)

NIE Zikai^1,2、*, BEN Jianwei^1,2, ZHANG Entao^1,2, MA Xiaobao^1,2, ZHANG Shanli^1,2, SHI Zhiming^1,2, LYU Shunpeng^1,2, JIANG Ke^1,2, SUN Xiaojuan^1,2, and LI Dabing^1,2

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NIE Zikai, BEN Jianwei, ZHANG Entao, MA Xiaobao, ZHANG Shanli, SHI Zhiming, LYU Shunpeng, JIANG Ke, SUN Xiaojuan, LI Dabing. Evolution of AlN Step Bunching Morphology During High-Temperature Annealing[J]. Journal of Synthetic Crystals, 2023, 52(6): 1016

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Paper Information

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Received: Apr. 14, 2023

Accepted: --

Published Online: Aug. 13, 2023

The Author Email: NIE Zikai (niezikai20@mails.ucas.ac.cn)

DOI:

CSTR:32186.14.

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology