[1] [1] Zijlstra P, Chon J W M and Gu M 2009 Five-dimensional optical recording mediated by surface plasmons in gold nanorods Nature459 410–3

[2] [2] Karst J, Floess M, Ubl M, Dingler C, Malacrida C, Steinle T, Ludwigs S, Hentschel M and Giessen H 2021 Electrically switchable metallic polymer nanoantennas Science374 612–6

[3] [3] Arbabi A, Horie Y, Bagheri M and Faraon A 2015 Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission Nat. Nanotechnol.10 937–43

[4] [4] Yu N F and Capasso F 2014 Flat optics with designer metasurfaces Nat. Mater.13 139–50

[5] [5] Hua J Y, Hua E K, Zhou F B, Shi J C, Wang C H, Duan H G, Hu Y Q, Qiao W and Chen L S 2021 Foveated glasses-free 3D display with ultrawide field of view via a large-scale 2D-metagrating complex Light Sci Appl10 213

[6] [6] Han D D, Zhang Y L, Ma J N, Liu Y Q, Han B and Sun H B 2016 Light-mediated manufacture and manipulation of actuators Adv. Mater.28 8328–43

[7] [7] Wei D Z et al 2018 Experimental demonstration of a three-dimensional lithium niobate nonlinear photonic crystal Nat. Photonics12 596–600

[8] [8] Zhang Y, Sheng Y, Zhu S N, Xiao M and Krolikowski W 2021 Nonlinear photonic crystals: from 2D to 3D Optica8 372–81

[9] [9] Chen Y et al 2022 Multidimensional nanoscopic chiroptics Nat. Rev. Phys.4 113–24

[10] [10] Sun L Y et al 2019 Separation of valley excitons in a MoS2 monolayer using a subwavelength asymmetric groove array Nat. Photonics13 180–4

[11] [11] Li S X, Xia H, Liu T Y, Zhu H, Feng J C, An Y, Zhang X L and Sun H B 2023 In situ encapsulated moir perovskite for stable photodetectors with ultrahigh polarization sensitivity Adv. Mater.35 2207771

[12] [12] Lu J F, Tian J, Poumellec B, Garcia-Caurel E, Ossikovski R, Zeng X L and Lancry M 2023 Tailoring chiral optical properties by femtosecond laser direct writing in silica Light Sci. Appl.12 46

[13] [13] Lu J F, Garcia-Caurel E, Ossikovski R, Courvoisier F, Zeng X L, Poumellec B and Lancry M 2023 Femtosecond laser direct writing multilayer chiral waveplates with minimal linear birefringence Opt. Lett.48 271–4

[14] [14] Wei D Z et al 2019 Efficient nonlinear beam shaping in three-dimensional lithium niobate nonlinear photonic crystals Nat. Commun.10 4193

[15] [15] Gao J C, Zhao X J, Yan Z, Fu Y H, Qiu J R, Wang L and Zhang J Y 2024 Multi-dimensional shingled optical recording by nanostructuring in glass Adv. Funct. Mater.34 2306870

[16] [16] Ouyang X et al 2021 Synthetic helical dichroism for six-dimensional optical orbital angular momentum multiplexing Nat. Photon.15 901–7

[17] [17] Zhang B, Tan D Z, Wang Z, Liu X F, Xu B B, Gu M, Tong L M and Qiu J R 2021 Self-organized phase-transition lithography for all-inorganic photonic textures Light Sci. Appl.10 93

[18] [18] Papadopoulos A, Skoulas E, Mimidis A, Perrakis G, Kenanakis G, Tsibidis G D and Stratakis E 2019 Biomimetic omnidirectional antireflective glass via direct ultrafast laser nanostructuring Adv. Mater.31 1901123

[19] [19] Zhang B, Wang Z, Tan D Z and Qiu J R 2023 Ultrafast laser-induced self-organized nanostructuring in transparent dielectrics: fundamentals and applications PhotoniX4 24

[20] [20] Wang Z, Zhang B, Wang Z Q, Zhang J, Kazansky P G, Tan D Z and Qiu J R 2023 3D imprinting of voxel-level structural colors in lithium niobate crystal Adv. Mater.35 2303256

[21] [21] Djogo G, Li J Z, Ho S, Haque M, Ertorer E, Liu J, Song X L, Suo J and Herman P R 2019 Femtosecond laser additive and subtractive micro-processing: enabling a high-channel-density silica interposer for multicore fibre to silicon-photonic packaging Int. J. Extrem. Manuf.1 045002

[22] [22] Lu Y, Kai L, Chen C Y, Yang Q, Meng Y Z, Liu Y, Cheng Y, Hou X and Chen F 2022 Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection Adv. Photon. Nexus1 026004

[23] [23] Hecker S, Blothe M and Graf T 2020 Reproducible process regimes during glass welding by bursts of subpicosecond laser pulses Appl. Opt.59 11382–8

[24] [24] Hecker S, Blothe M, Grossmann D and Graf T 2020 Process regimes during welding of glass by femtosecond laser pulse bursts Appl. Opt.59 6452–8

[25] [25] Rdenas A, Gu M, Corrielli G, Pai P, John S, Kar A K and Osellame R 2019 Three-dimensional femtosecond laser nanolithography of crystals Nat. Photonics13 105–9

[26] [26] Jia Y C, Wang S X and Chen F 2020 Femtosecond laser direct writing of flexibly configured waveguide geometries in optical crystals: fabrication and application Opto-Electron. Adv.3 190042

[27] [27] Jin F, Liu J, Zhao Y Y, Dong X Z, Zheng M L and Duan X M 2022 /30 inorganic features achieved by multi-photon 3D lithography Nat. Commun.13 1357

[28] [28] Zhang X L, Yu F, Chen Z G, Tian Z N, Chen Q D, Sun H B and Ma G C 2022 Non-Abelian braiding on photonic chips Nat. Photon.16 390–5

[29] [29] Sugioka K 2019 Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review Int. J. Extrem. Manuf.1 012003

[30] [30] Von der Linde D, Sokolowski-Tinten K and Bialkowski J 1997 Laser–solid interaction in the femtosecond time regime Appl. Surf. Sci.109–110 1–10

[31] [31] Stuart B C, Feit M D, Herman S, Rubenchik A M, Shore B W and Perry M D 1996 Nanosecond-to-femtosecond laser-induced breakdown in dielectrics Phys. Rev. B 53 1749–61

[32] [32] Du D, Liu X, Korn G, Squier J and Mourou G 1994 Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs Appl. Phys. Lett.64 3071–3

[33] [33] Tsibidis G D and Stratakis E 2020 Ionisation processes and laser induced periodic surface structures in dielectrics with mid-infrared femtosecond laser pulses Sci. Rep.10 8675

[34] [34] Schaffer C B, Brodeur A and Mazur E 2001 Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses Meas. Sci. Technol.12 1784–94

[35] [35] Itoh K, Watanabe W, Nolte S and Schaffer C B 2006 Ultrafast processes for bulk modification of transparent materials MRS Bull.31 620–5

[36] [36] Taylor R, Hnatovsky C and Simova E 2008 Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass Laser Photonics Rev.2 26–46

[37] [37] Rajeev P P, Gertsvolf M, Hnatovsky C, Simova E, Taylor R S, Corkum P B, Rayner D M and Bhardwaj V R 2007 Transient nanoplasmonics inside dielectrics J. Phys. B: At. Mol. Opt. Phys.40 S273–82

[38] [38] Bhardwaj V R, Simova E, Rajeev P P, Hnatovsky C, Taylor R S, Rayner D M and Corkum P B 2006 Optically produced arrays of planar nanostructures inside fused silica Phys. Rev. Lett.96 057404

[39] [39] Hnatovsky C, Taylor R S, Rajeev P P, Simova E, Bhardwaj V R, Rayner D M and Corkum P B 2005 Pulse duration dependence of femtosecond-laser-fabricated nanogratings in fused silica Appl. Phys. Lett.87 014104

[40] [40] Shimotsuma Y, Kazansky P G, Qiu J R and Hirao K 2003 Self-organized nanogratings in glass irradiated by ultrashort light pulses Phys. Rev. Lett.91 247405

[41] [41] Zhang F T, Nie Z G, Huang H X, Ma L, Tang H, Hao M M and Qiu J R 2019 Self-assembled three-dimensional periodic micro-nano structures in bulk quartz crystal induced by femtosecond laser pulses Opt. Express27 6442–50

[42] [42] Yang W J, Bricchi E, Kazansky P G, Bovatsek J and Arai A Y 2006 Self-assembled periodic sub-wavelength structures by femtosecond laser direct writing Opt. Express14 10117–24

[43] [43] Lu J F, Dai Y, Li Q, Zhang Y L, Wang C H, Pang F F, Wang T Y and Zeng X L 2019 Fiber nanogratings induced by femtosecond pulse laser direct writing for in-line polarizer Nanoscale11 908–14

[44] [44] Cao J, Mazerolles L, Lancry M, Brisset F and Poumellec B 2017 Modifications in lithium niobium silicate glass by femtosecond laser direct writing: morphology, crystallization, and nanostructure J. Opt. Soc. Am. B 34 160–8

[45] [45] Zhang J Y, Geceviius M, Beresna M and Kazansky P G 2014 Seemingly unlimited lifetime data storage in nanostructured glass Phys. Rev. Lett.112 033901

[46] [46] Shimotsuma Y, Sakakura M, Kazansky P G, Beresna M, Qiu J R, Miura K and Hirao K 2010 Ultrafast manipulation of self-assembled form birefringence in glass Adv. Mater.22 4039–43

[47] [47] Wang Y T, Lancry M, Cavillon M and Poumellec B 2022 Lifetime prediction of nanogratings inscribed by a femtosecond laser in silica glass Opt. Lett.47 1242–5

[48] [48] Wang Z, Zhang B, Tan D Z and Qiu J R 2023 Ostensibly perpetual optical data storage in glass with ultra-high stability and tailored photoluminescence Opto-Electron. Adv.6 220008

[49] [49] Wang M H et al 2021 Femtosecond laser fabrication of nanograting-based distributed fiber sensors for extreme environmental applications Int. J. Extrem. Manuf.3 025401

[50] [50] Eaton S M, Zhang H B, Herman P R, Yoshino F, Shah L, Bovatsek J and Arai A Y 2005 Heat accumulation effects in femtosecond laser-written waveguides with variable repetition rate Opt. Express13 4708–16

[51] [51] Kawata S, Sun H B, Tanaka T and Takada K 2001 Finer features for functional microdevices Nature412 697–8

[52] [52] Tan D Z, Zhang B and Qiu J R 2021 Ultrafast laser direct writing in glass: thermal accumulation engineering and applications. Laser Photon. Rev.15 2000455