Fig. 1. (a) Schematic diagram of the dual-shutter VOA^[21]. (b, c) Fabricated dual-shutter VOA device and a close-up image of the shutter part^[21].

Fig. 2. (Color online) (a) Schematic of two pixels of a DMD chip^[19]. (b) An electromagnetically actuated micromirror^[39]. (c) An electromagnetically driven 2D MOEMS mirror^[37]. (d) A wire bonded 1 × 20 MEMS mirror array^[40]. (e) An electrothermal bimorph-actuated MOEMS mirror^[41]. (f) A 3D curved micromirror for collimating the output beam of single-mode fibers^[42]. (g) Cross section and top view of an electromechanically driven adaptive astigmatic membrane mirror^[43]. (h) A micro-deformable mirror architecture^[44].

Fig. 3. (Color online) (a) SEM image of the fabricated MMI-based spectrometer^[52]. (b) Multirange spectrometer system^[62]. (c) Scanning grating MEMS device (dimensions: 9.6 × 5.3 × 0.5 mm³)^[58]. (d) Schematic of the MOEMS spectrometer^[51]. (e) SEM image of the scanning diffraction grating^[63]. (f) Schematic of the FT spectrometer system on a Si optical bench^[64].

Fig. 4. (Color online) (a) Schematic of the MEMS-actuated matrix switch^[67]. (b) Schematic of polarization-insensitive Si photonic MEMS switches^[70]. (c) Schematic representation of a vertically movable silicon photonic MEMS switch^[71]. Dimensions are not to scale. (d) SEM image showing the grating switch with a stiffener^[74].