[1] Sherrott M C, Hon P W C, Fountaine K T et al. Experimental demonstration of >230° phase modulation in gate-tunable graphene-gold reconfigurable mid-infrared metasurfaces[J]. Nano Letters, 17, 3027-3034(2017).

[2] Li Z B, Yao K, Xia F N et al. Graphene plasmonic metasurfaces to steer infrared light[J]. Scientific Reports, 5, 12423(2015).

[3] Zhang Z, Yan X, Liang L J et al. The novel hybrid metal-graphene metasurfaces for broadband focusing and beam-steering in farfield at the terahertz frequencies[J]. Carbon, 132, 529-538(2018).

[4] Sun Z S, Zheng Y J, Fu Y Q. Graphene-based spatial light modulator using metal hot spots[J]. Materials, 12, E3082(2019).

[5] Iyer P P, Butakov N A, Schuller J A. Reconfigurable semiconductor phased-array metasurfaces[J]. ACS Photonics, 2, 1077-1084(2015).

[6] Zhou C B, Qu X Y, Xiao S Y et al. Imaging through a Fano-resonant dielectric metasurface governed by quasi: bound states in the continuum[J]. Physical Review Applied, 14, 044009(2020).

[7] Kamali S M, Arbabi E, Arbabi A et al. A review of dielectric optical metasurfaces for wavefront control[J]. Nanophotonics, 7, 1041-1068(2018).

[8] Yuan Y H, Chen X Y, Hu F R et al. Terahertz amplitude modulator based on metasurface/ion-gel/graphene hybrid structure[J]. Chinese Journal of Lasers, 46, 0614016(2019).

[9] Ju L, Geng B, Horng J et al. Graphene plasmonics for tunable terahertz metamaterials[J]. Nature Nanotechnology, 6, 630-634(2011).

[10] Liang G Z, Hu X N, Yu X C et al. Integrated terahertz graphene modulator with 100% modulation depth[J]. ACS Photonics, 2, 1559-1566(2015).

[11] Forouzmand A, Salary M M, Shirmanesh G K et al. Tunable all-dielectric metasurface for phase modulation of the reflected and transmitted light via permittivity tuning of indium tin oxide[J]. Nanophotonics, 8, 415-427(2019).

[12] Nouman M T, Hwang J, Faiyaz M et al. Dynamic-metasurface-based cavity structures for enhanced absorption and phase modulation[J]. ACS Photonics, 6, 374-381(2019).

[13] Smolyaninov A, El Amili A, Vallini F et al. Programmable plasmonic phase modulation of free-space wavefronts at gigahertz rates[J]. Nature Photonics, 13, 431-435(2019).

[14] Cheng J R, Fan F, Chang S J. Recent progress on graphene-functionalized metasurfaces for tunable phase and polarization control[J]. Nanomaterials, 9, 398(2019).

[15] Cong L, Srivastava Y K, Zhang H et al. All-optical active THz metasurfaces for ultrafast polarization switching and dynamic beam splitting[J]. Light, Science & Applications, 7, 28(2018).

[16] Arbabi A, Horie Y, Bagheri M et al. Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission[J]. Nature Nanotechnology, 10, 937-943(2015).

[17] Li S Q, Xu X, Veetil R M et al. Phase-only transmissive spatial light modulator based on tunable dielectric metasurface[J]. Science, 364, 1087-1090(2019).

[18] Hua Q Y, Chen X H, Lü J P et al. Reflection-type electromagnetically induced transparency effect in terahertz metasurfaces[J]. Chinese Journal of Lasers, 48, 1214002(2021).

[19] Luo Y, Wang W T, Zhao P J et al. Dual-mode metasurface of polarization-specific focusing and keeping wavefront[J]. Chinese Journal of Lasers, 47, 0301007(2020).

[20] Zheng G, Mühlenbernd H, Kenney M et al. Metasurface holograms reaching 80% efficiency[J]. Nature Nanotechnology, 10, 308-312(2015).

[21] Park J, Kang J H, Kim S J et al. Dynamic reflection phase and polarization control in metasurfaces[J]. Nano Letters, 17, 407-413(2017).

[22] Yang W, Sun T, Rao Y et al. High speed optical phased array using high contrast grating all-pass filters[J]. Optics Express, 22, 20038-20044(2014).

[23] Resler D P, Hobbs D S, Sharp R C et al. High-efficiency liquid-crystal optical phased-array beam steering[J]. Optics Letters, 21, 689-691(1996).

[24] Hashemi M R M, Yang S H, Wang T Y et al. Electronically-controlled beam-steering through vanadium dioxide metasurfaces[J]. Scientific Reports, 6, 35439(2016).

[25] Zhou C B, Li S Y, Fan M H et al. Optical radiation manipulation of Si-Ge2Sb2Te5 hybrid metasurfaces[J]. Optics Express, 28, 9690-9701(2020).

[26] Zhang Y, Feng Y, Zhao J et al. Terahertz beam switching by electrical control of graphene-enabled tunable metasurface[J]. Scientific Reports, 7, 14147(2017).

[27] Wu P C, Pala R A, Shirmanesh G K et al. Dynamic beam steering with all-dielectric electro-optic III-V multiple-quantum-well metasurfaces[J]. Nature Communications, 10, 3654(2019).

[28] Liu M, Yin X B, Ulin-Avila E et al. A graphene-based broadband optical modulator[J]. Nature, 474, 64-67(2011).

[29] Hao R, Du W, Chen H S et al. Ultra-compact optical modulator by graphene induced electro-refraction effect[J]. Applied Physics Letters, 103, 061116(2013).

[30] Kakenov N, Ergoktas M S, Balci O et al. Graphene based terahertz phase modulators[J]. 2D Materials, 5, 035018(2018).

[31] Li Z Y, Yu N F. Modulation of mid-infrared light using graphene-metal plasmonic antennas[J]. Applied Physics Letters, 102, 131108(2013).

[32] Abdollah Ramezani S, Arik K, Farajollahi S et al. Beam manipulating by gate-tunable graphene-based metasurfaces[J]. Optics Letters, 40, 5383-5386(2015).

[33] Shirmanesh G K, Sokhoyan R, Wu P C et al. Electro-optically tunable multifunctional metasurfaces[J]. ACS Nano, 14, 6912-6920(2020).

[34] Shirmanesh G K, Sokhoyan R, Pala R A et al. Dual-gated active metasurface at 1550 nm with wide (>300°) phase tunability[J]. Nano Letters, 18, 2957-2963(2018).

[35] Forouzmand A, Mosallaei H. Electro-optical amplitude and phase modulators based on tunable guided-mode resonance effect[J]. ACS Photonics, 6, 2860-2869(2019).

[36] Nie L X, Zhang Y, Xian S L et al. High-speed and low-insertion-loss silicon waveguide phase shifter based on high mobility transparent conductive oxides[J]. Laser & Optoelectronics Progress, 56, 152302(2019).

[37] Sun Z S, Huang F M, Fu Y Q. Graphene-based spatial light modulator using optical checkerboard AMC metasurface[J]. Optics Communications, 474, 126115(2020).

[38] Wu C, Neuner B, Shvets G et al. Large-area wide-angle spectrally selective plasmonic absorber[J]. Physical Review B, 84, 075102(2011).

[39] Qu C, Ma S, Hao J et al. Tailor the functionalities of metasurfaces based on a complete phase diagram[J]. Physical Review Letters, 115, 235503(2015).

[40] Sun Z S, Huang F M, Fu Y Q. Graphene-based active metasurface with more than 330° phase tunability operating at mid-infrared spectrum[J]. Carbon, 173, 512-520(2021).