Fabrication of 8-element Linear VO<sub>x</sub> Uncooled Microbolometer IR Detector Array

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 28, Issue 12, 1082(2001)

Fabrication of 8-element Linear VO_x Uncooled Microbolometer IR Detector Array

[in Chinese]^1,2, [in Chinese]^1,2, [in Chinese]¹, [in Chinese]², [in Chinese]², and [in Chinese]³

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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References(5)

[1] [1] R. A. Wood, N. A. Foss. Micromachined bolometer arrays achieve low-cost imaging. Laser Focus World, 1993, 29(6):101～106

[2] [2] J. Kreider, P. Howard, C. Li et al.. Uncooled infrared arrays sense image scenes. Laser Focus World, 1997, 33(8):139～150

[3] [3] R. J. Herring, P. E. Howard. Design and performance of the ULTRA 320×240 uncooled focal planearray and sensor. SPIE, 1996, 2746:2～12

[4] [4] H. Jerominek, F. Picard, N. R. Swart et al.. Micromachined uncooled VO2-based IR bolometer arrays. SPIE, 1996, 2746:60～71

[5] [5] A. Jahanzeb, C. M. Travers, Z. Celik-Butler. A semiconductor YBaCuO microbolometer for room temperature IR imaging. IEE Trans. Electron. Devices, 1997, 44:1795～1801

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Fabrication of 8-element Linear VO_x Uncooled Microbolometer IR Detector Array[J]. Chinese Journal of Lasers, 2001, 28(12): 1082

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Paper Information

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Received: Sep. 28, 2000

Accepted: --

Published Online: Aug. 10, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology