Spectroscopy and Spectral Analysis, Volume. 42, Issue 8, 2411(2022)

A High Precision and Large Range Measuring Method for Broadband Light Interferometric Microscopy Based on Phase Unwrapping and Stitching Algorithm

Wen-hao ZHAO1、*, Jun LI1、1;, Kai DU1、1;, Liang XIONG1、1;, Shao-yun YIN1、1;, Jian-ming HU3、3;, and Jin-yu WANG1、1; 2; *;
Author Affiliations
  • 11. Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing 400714, China
  • 33. College of Physics and Electronic Engineering, Chongqing Normal University, Chongqing 401331, China
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    Wen-hao ZHAO, Jun LI, Kai DU, Liang XIONG, Shao-yun YIN, Jian-ming HU, Jin-yu WANG. A High Precision and Large Range Measuring Method for Broadband Light Interferometric Microscopy Based on Phase Unwrapping and Stitching Algorithm[J]. Spectroscopy and Spectral Analysis, 2022, 42(8): 2411

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    Paper Information

    Category: Orginal Article

    Received: Jul. 28, 2021

    Accepted: --

    Published Online: Mar. 17, 2025

    The Author Email: Wen-hao ZHAO (zhaowenhao@cigit.ac.cn)

    DOI:10.3964/j.issn.1000-0593(2022)08-2411-07

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