High-Precision Phase Extraction and Error Analysis of Ronchi Lateral Shearing Interferometry

Chunchao Chang; Zhongliang Li; Yunjun Lu; Xiangzhao Wang

doi:10.3788/CJL240463

Chinese Journal of Lasers, Volume. 51, Issue 11, 1101031(2024)

High-Precision Phase Extraction and Error Analysis of Ronchi Lateral Shearing Interferometry

Chunchao Chang^1,2, Zhongliang Li^1,2、*, Yunjun Lu¹, and Xiangzhao Wang^1,3,4

¹Laboratory of Information Optics and Opto-Electronic Technology, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang , China

⁴State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang University, Hangzhou 310058, Zhejiang , China

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References(29)

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Chunchao Chang, Zhongliang Li, Yunjun Lu, Xiangzhao Wang. High-Precision Phase Extraction and Error Analysis of Ronchi Lateral Shearing Interferometry[J]. Chinese Journal of Lasers, 2024, 51(11): 1101031

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Paper Information

Category: laser devices and laser physics

Received: Jan. 5, 2024

Accepted: Feb. 18, 2024

Published Online: Jun. 11, 2024

The Author Email: Li Zhongliang (lizhongliang@siom.ac.cn)

DOI:10.3788/CJL240463

CSTR:32183.14.CJL240463

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology