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Chinese Journal of Lasers, Volume. 36, Issue 2, 439(2009)

Influence of Metal-Coated Mirrors on Measurement Accuracy in Heterodyne Interferometric Ellipsometry

Deng Yuanlong1,2、*, Li Yuezhi1, Wu Yubin1, and Xu Gang1,2
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    Deng Yuanlong, Li Yuezhi, Wu Yubin, Xu Gang. Influence of Metal-Coated Mirrors on Measurement Accuracy in Heterodyne Interferometric Ellipsometry[J]. Chinese Journal of Lasers, 2009, 36(2): 439

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    Paper Information

    Category: measurement and metrology

    Received: Feb. 25, 2008

    Accepted: --

    Published Online: Feb. 23, 2009

    The Author Email: Yuanlong Deng (dengyL@szu.edu.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology