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Acta Optica Sinica, Volume. 35, Issue 12, 1208002(2015)

Research on Ultra-Precision Positioning Technology Using Reflective Gratings

Fan Yuqi1、*, Zhou Chen1, Zhang Jinlong1, Liu Jingnan2, and Yoshihisa Uchida3
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    Fan Yuqi, Zhou Chen, Zhang Jinlong, Liu Jingnan, Yoshihisa Uchida. Research on Ultra-Precision Positioning Technology Using Reflective Gratings[J]. Acta Optica Sinica, 2015, 35(12): 1208002

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    Paper Information

    Category: Geometric Optics

    Received: May. 29, 2015

    Accepted: --

    Published Online: Dec. 10, 2015

    The Author Email: Fan Yuqi (nsdfyq@163.com)

    DOI:10.3788/aos201535.1208002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology