[1] [1] KRISHNAN A, FANG F Z. Review on mechanism and process of surface polishing using lasers［J］. Frontiers of Mechanical Engineering, 2019, 14(3): 299-319.

[2] [2] LIU Y, SUN Y, YI Y J, et al. All polymer asymmetric Mach-Zehnder interferometer waveguide sensor by imprinting bonding and laser polishing［J］. Chinese Physics B, 2017, 26(12): 124215.

[3] [3] CHOI H K, JUNG D, SOHN I B, et al. Diffraction efficiency enhancement of femtosecond laser-engraved diffraction gratings due to CO2 laser polishing［J］. Journal of the Korean Physical Society, 2014, 65(10): 1559-1565.

[4] [4] SCHWARZ S, RUNG S, ESEN C, et al. Fabrication of a high-quality axicon by femtosecond laser ablation and CO2 laser polishing for quasi-bessel beam generation［J］. Optics Express, 2018, 26(18): 23287-23294.

[5] [5] HEIDRICH S, WILLENBORG E, WEINGARTEN C, et al. Laser polishing and laser form correction of fused silica optics［J］. Materialwissenschaft Und Werkstofftechnik, 2015, 46(7): 668-674.

[6] [6] SERHATLIOGLU M, ORTA B, ELBUKEN C, et al. CO2 laser polishing of microfluidic channels fabricated by femtosecond laser assisted carving［J］. Journal of Micromechanics and Microengineering, 2016, 26(11): 115011.

[7] [7] WEINGARTEN C, STEENHUSEN S, HERMANS M, et al. Laser polishing and 2PP structuring of inside microfluidic channels in fused silica［J］. Microfluidics and Nanofluidics, 2017, 21(11): 1-9.

[8] [8] BHADURI D, PENCHEV P, BATAL A, et al. Laser polishing of 3D printed mesoscale components［J］. Applied Surface Science, 2017, 405: 29-46.

[9] [9] ROSA B, MOGNOL P, HASCOT J Y. Laser polishing of additive laser manufacturing surfaces［J］. Journal of Laser Applications, 2015, 27(S2): S29102.

[10] [10] HECHT K, BLIEDTNER J, ROST M, et al. Carbon-dioxide laser beam polishing of fused silica surfaces-process development and optimization［J］. Advanced Engineering Materials, 2015, 17(3): 240-246.

[11] [11] CHEN C, TSAI H L. Fundamental study of the bulge structure generated in laser polishing process［J］. Optics and Lasers in Engineering, 2018, 107: 54-61.

[12] [12] TEMMLER A, WILLENBORG E, WISSENBACH K. Design surfaces by laser remelting［J］. Physics Procedia, 2011, 12: 419-430.

[13] [13] HAFIZ A M K, BORDATCHEV E V, TUTUNEA-FATAN R O. Influence of overlap between the laser beam tracks on surface quality in laser polishing of AISI H13 tool steel［J］. Journal of Manufacturing Processes, 2012, 14(4): 425-434.

[14] [14] PFEFFERKORN F E, DUFFIE N A, LI X C, et al. Improving surface finish in pulsed laser micro polishing using thermocapillary flow［J］. CIRP Annals, 2013, 62(1): 203-206.

[15] [15] HAFIZ A M K, BORDATCHEV E V, TUTUNEA-FATAN R O. Experimental analysis of applicability of a picosecond laser for micro-polishing of micromilled Inconel 718 superalloy［J］. The International Journal of Advanced Manufacturing Technology, 2014, 70(9-12): 1963-1978.

[16] [16] CHANG C S, CHEN T H, LI T C, et al. Influence of laser beam fluence on surface quality, microstructure, mechanical properties, and tribological results for laser polishing of SKD61 tool steel［J］. Journal of Materials Processing Technology, 2016, 229: 22-35.

[17] [17] DAI W, LI J J, ZHANG W K, et al. Evaluation of fluences and surface characteristics in laser polishing SKD 11 tool steel［J］. Journal of Materials Processing Technology, 2019, 273: 116241.

[18] [18] LI J, YANG Y, JIN W F, et al. Error remapping of surface morphology by laser polishing［J］. Surface Technology, 2020, 49(2): 309-315.

[19] [19] GAO Y B, WU B X, ZHOU Y, et al. A two-step nanosecond laser surface texturing process with smooth surface finish［J］. Applied Surface Science, 2011, 257(23): 9960-9967.

[20] [20] LI J, WANG X. Numerical simulation of the influence of the bulges around laser surface textures on the tribological performance［J］. Tribology Transactions, 2013, 56(6): 1011-1018.

[21] [21] LI J, ZOU Z Q, HU L Y, et al. Discussion of the paper: surface texturing by pulsed Nd: YAG laser［J］. Tribology International, 2017, 115: 1-2.