Damage evolution and removal behaviors of GaN crystals involved in double-grits grinding

Chen Li; Yuxiu Hu; Zongze Wei; Chongjun Wu; Yunfeng Peng; Feihu Zhang; Yanquan Geng

doi:10.1088/2631-7990/ad207f

International Journal of Extreme Manufacturing, Volume. 6, Issue 2, 25103(2024)

Damage evolution and removal behaviors of GaN crystals involved in double-grits grinding

Chen Li^1,2, Yuxiu Hu¹, Zongze Wei¹, Chongjun Wu³, Yunfeng Peng⁴, Feihu Zhang¹, and Yanquan Geng^1,2、*

¹State Key Laboratory of Robotics and System (HIT), Harbin Institute of Technology, Harbin 150001,People’s Republic of China

²Key Laboratory of Microsystems and Microstructures Manufacturing (HIT), Harbin Institute of Technology, Harbin 150001, People’s Republic of China

³College of Mechanical Engineering, Donghua University, Shanghai 201620, People’s Republic of China

⁴Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, People’s Republic of China

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Chen Li, Yuxiu Hu, Zongze Wei, Chongjun Wu, Yunfeng Peng, Feihu Zhang, Yanquan Geng. Damage evolution and removal behaviors of GaN crystals involved in double-grits grinding[J]. International Journal of Extreme Manufacturing, 2024, 6(2): 25103

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Paper Information

Received: Dec. 7, 2023

Accepted: --

Published Online: Sep. 6, 2024

The Author Email: Yanquan Geng (gengyanquan@hit.edu.cn)

DOI:10.1088/2631-7990/ad207f

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology