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Opto-Electronic Engineering, Volume. 38, Issue 6, 71(2011)

Output Model and Simulation for Optical Field with Metrological Grating Space Pose Parameters

HU Yi1、*, FEI Ye-tai1, and YE Si-ran2
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  • 1[in Chinese]
  • 2[in Chinese]
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    [1] [1] MA Xiu-shui, FEI Ye-tai, CHEN Xiao-huai, et al. Research and Development of grating nanometer measurement [J]. Instrument Technique and Sensor, 2006(4): 53-55.

    [2] [2] WANG Yu-zhi, AI Hua, HAN Xu-dong. Extraction of Moiré Fringe Signal for Photoelectric Encoder Based on Grating Self-imaging [J]. Opto-Electronic Engineering, 2010, 36(1): 78-87.

    [3] [3] FAN Shu-wei, ZHOU Qing-hua, LI Hong. Research of Optim ization Design of Groove Diffraction Grating Profile Parameters [J]. Acta Photonica Sinica, 2010, 30(11): 3133-3139.

    [4] [4] CAI Tuo, SANG Tian, ZHAO Hua. Coupled-wave Analysis, Numerical Calculation and Discussion for Diffraction Properties of Grating [J]. Opto-Electronic Engineering, 2010, 37(4): 141-146.

    [5] [5] FANG Jing-yue, QIN Shi-qiao, WANG Xing-shu, et al. Frequency Domain Analysis of Small Angle Measurement with Moire Fringe [J]. Acta Photonica Sinica, 2010, 39(4): 709-713.

    [6] [6] YU Dao-yin, TAN Heng-ying. Engineering Optics[M]. Beijing: China Machine Press, 2002.

    [7] [7] CHAO Xiang-qun, HUANG Wei-shi, JIN Tong. Metrological Technology by Gratings [M]. Hangzhou: Zhejiang University Press, 1992.

    [8] [8] Akiya KIMURA, Kiyokazu YASUDA, Michiya MATSUSHIMA, et al. Propagation Loss Evaluation of Optical Transmission/Interconnect System with Grating Structure [C]// 2005 International Symposium on Electronics Materials and Packaging (EMAP2005), Tokyo, Japan, Dec 11-14, 2005: 125-128.

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    HU Yi, FEI Ye-tai, YE Si-ran. Output Model and Simulation for Optical Field with Metrological Grating Space Pose Parameters[J]. Opto-Electronic Engineering, 2011, 38(6): 71

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    Paper Information

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    Received: Jan. 21, 2011

    Accepted: --

    Published Online: Jul. 1, 2011

    The Author Email: Yi HU (huyiyb@yeah.net)

    DOI:10.3969/j.issn.1003-501x.2011.06.012

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology