Acta Optica Sinica, Volume. 43, Issue 11, 1122001(2023)

Design and Fabrication of Asymmetric Microstructure for Stray Light Suppression in Optical System

Jing Shao1,2、*, Zhuo Li1,2, Zhenwei Nie3, Hao Dong1,2, Yingming Wang1,2, Junyue Sun4、**, Haitao Zhang3,5, and Facai Zhao6
Author Affiliations
  • 1Shandong Collaborative Innovation Center of Laser Green Intelligent Manufacturing Technology and Equipment, Qingdao University of Technology, Qingdao 266520, Shandong, China
  • 2Key Lab of Industrial Fluid Energy Conservation and Pollution Control (Qingdao University of Technology), Ministry of Education, Qingdao 266520, Shandong, China
  • 3Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, Jilin, China
  • 4Beijing Changfeng Kewei Photo-Electronic Technology Co., Ltd., Beijing 100195, China
  • 5University of Chinese Academy of Sciences, Beijing 100049, China
  • 6The 41st Research Institute of CETC, Qingdao 266555, Shandong, China
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    Figures & Tables(10)
    Stary light reflection at β=45°. (a) Incident stray light at large angle; (b) incident stray light at small angle
    Stary light reflection at β>45°. (a) Incident stray light at large angle; (b) incident stray light at small angle
    Stary light reflection at β<45°. (a) Incident stray light at large angle; (b) incident stray light at small angle
    Range and intensity distribution of focusing laser spot at different tilt angles. (a) Range; (b) intensity distribution
    Schematic diagram of high-speed laser processing device
    Confocal microscopic imaging of sample surface under different scanning velocity. (a) 500 mm/s; (b) 900 mm/s; (c) 1200 mm/s; (d) 1600 mm/s
    Microstructure morphology measurement. (a) Side view of microstructure microscopy image; (b) longitudinal cross-sectional profile image of microstructure
    Experimental diagram of surface reflection testing. (a) Testing device graph; (b) schematic diagram of testing device; (c) test result of anodized sample; (d) test result of processed sample
    Schematic diagram of simulation integrated experiment
    • Table 1. Laser processing parameters

      View table

      Table 1. Laser processing parameters

      ParameterValue
      Laser power /W40
      Scanning velocity /(mm·s-1500-2000
      Repetition frequency /kHz50
      Tilt angle /(°)60
      Microstructure width /μm130
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    Jing Shao, Zhuo Li, Zhenwei Nie, Hao Dong, Yingming Wang, Junyue Sun, Haitao Zhang, Facai Zhao. Design and Fabrication of Asymmetric Microstructure for Stray Light Suppression in Optical System[J]. Acta Optica Sinica, 2023, 43(11): 1122001

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Nov. 29, 2022

    Accepted: Feb. 10, 2023

    Published Online: Jun. 13, 2023

    The Author Email: Shao Jing (qunying12@163.com), Sun Junyue (sun_junyue@sina.cn)

    DOI:10.3788/AOS222069

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