Acta Optica Sinica, Volume. 43, Issue 21, 2112005(2023)
Automatic and Quantitative Testing Technology of Knife-Edge Method Based on Virtual Screen Modulation
Fig. 1. Schematic diagrams of position principle. (a) Schematic diagram of loading traditional solid screen; (b) schematic diagram of loading digital mask screen
Fig. 2. Schematic diagram of principle of adding a mask screen to a series of shadow grams collected along optical axis and searching for shadow grams located at curvature center of target ring
Fig. 6. A series of knife-edge shadow grams distributed along optical axis simulated by Zemax optical design software
Fig. 8. Schematic diagrams of simulation results using Zemax and proposed method. (a) Schematic diagram of ring position simulated using Zemax; (b) surface shape calculation results simulated using proposed method when defect size is λ/2; (c) surface shape calculation results simulated using proposed method when ring defect size is λ/30
Fig. 10. Schematic diagram of a representative series of shadow grams collected along optical axis
Fig. 11. Comparison of testing results. (a) Interferometer testing result profile; (b) ring error relative position testing results of proposed method; (c) calculation results of curvature of ring error at different positions
Fig. 13. Comparison of testing results. (a) Surface shape testing results of interferometer standard method; (b) surface shape testing results of proposed method
Fig. 14. Comparison of profile testing results. (a) Profile testing results of interferometer standard method; (b) profile testing results of proposed method
Fig. 15. Calculation results of surface wavefront errors when collection interval between shadow grams is 0.3 mm, and ring belt segmentation numbers are different. Ring belt segmentation numbers are (a) 50, (b) 100, and (c) 200, respectively
Fig. 16. Calculation results of surface wavefront errors corresponding to different collection intervals when number of shadow grams ring belt segmentation is 100. Collection intervals are (a) 0.3 mm, (b) 0.6 mm, and (c) 0.9 mm, respectively
Fig. 17. Schematic diagram of denoising process. (a) Knife-edge shadow gram before denoising; (b) knife-edge shadow gram after denoising; (c) schematic diagram of removed noise points
|
Get Citation
Copy Citation Text
Xiang Hua, Zhaoyang Jiao, Jianqiang Zhu. Automatic and Quantitative Testing Technology of Knife-Edge Method Based on Virtual Screen Modulation[J]. Acta Optica Sinica, 2023, 43(21): 2112005
Category: Instrumentation, Measurement and Metrology
Received: May. 23, 2023
Accepted: Jun. 20, 2023
Published Online: Nov. 8, 2023
The Author Email: Jiao Zhaoyang (zhyjiao@siom.ac.cn), Zhu Jianqiang (jqzhu@siom.ac.cn)