Acta Optica Sinica, Volume. 43, Issue 21, 2112005(2023)

Automatic and Quantitative Testing Technology of Knife-Edge Method Based on Virtual Screen Modulation

Xiang Hua1,2,3, Zhaoyang Jiao1,2、*, and Jianqiang Zhu1,2、**
Author Affiliations
  • 1Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2National Laboratory on High Power Laser and Physics, China Academy of Engineering Physics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
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    Figures & Tables(18)
    Schematic diagrams of position principle. (a) Schematic diagram of loading traditional solid screen; (b) schematic diagram of loading digital mask screen
    Schematic diagram of principle of adding a mask screen to a series of shadow grams collected along optical axis and searching for shadow grams located at curvature center of target ring
    Schematic diagram of ring belt screen mask segmentation
    Schematic diagram of loading ring belt screen mask and image processing
    Schematic diagram of testing
    A series of knife-edge shadow grams distributed along optical axis simulated by Zemax optical design software
    Schematic diagram of shadow grams processing
    Schematic diagrams of simulation results using Zemax and proposed method. (a) Schematic diagram of ring position simulated using Zemax; (b) surface shape calculation results simulated using proposed method when defect size is λ/2; (c) surface shape calculation results simulated using proposed method when ring defect size is λ/30
    Experimental system setup diagram
    Schematic diagram of a representative series of shadow grams collected along optical axis
    Comparison of testing results. (a) Interferometer testing result profile; (b) ring error relative position testing results of proposed method; (c) calculation results of curvature of ring error at different positions
    Schematic diagram of shadow gram processing in testing experiment
    Comparison of testing results. (a) Surface shape testing results of interferometer standard method; (b) surface shape testing results of proposed method
    Comparison of profile testing results. (a) Profile testing results of interferometer standard method; (b) profile testing results of proposed method
    Calculation results of surface wavefront errors when collection interval between shadow grams is 0.3 mm, and ring belt segmentation numbers are different. Ring belt segmentation numbers are (a) 50, (b) 100, and (c) 200, respectively
    Calculation results of surface wavefront errors corresponding to different collection intervals when number of shadow grams ring belt segmentation is 100. Collection intervals are (a) 0.3 mm, (b) 0.6 mm, and (c) 0.9 mm, respectively
    Schematic diagram of denoising process. (a) Knife-edge shadow gram before denoising; (b) knife-edge shadow gram after denoising; (c) schematic diagram of removed noise points
    • Table 1. Position number of knife-edge shadow gram corresponding to curvature centers of different bands

      View table

      Table 1. Position number of knife-edge shadow gram corresponding to curvature centers of different bands

      Number of ring beltRing belt position(Relative to radius size)Position number of shadow gram
      10-0.182
      20.1-0.284

      3

      4

      5

      6

      7

      8

      9

      10

      0.2-0.3

      0.3-0.4

      0.4-0.5

      0.5-0.6

      0.6-0.7

      0.7-0.8

      0.8-0.9

      0.9-1.0

      82

      43

      43

      38

      43

      30

      35

      83

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    Xiang Hua, Zhaoyang Jiao, Jianqiang Zhu. Automatic and Quantitative Testing Technology of Knife-Edge Method Based on Virtual Screen Modulation[J]. Acta Optica Sinica, 2023, 43(21): 2112005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 23, 2023

    Accepted: Jun. 20, 2023

    Published Online: Nov. 8, 2023

    The Author Email: Jiao Zhaoyang (zhyjiao@siom.ac.cn), Zhu Jianqiang (jqzhu@siom.ac.cn)

    DOI:10.3788/AOS231031

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