In order to find zero Optical Path Difference (OPD) position with high precision in white light interferometry, the algorithm of spatial frequency domain analysis is studied. The phase information of the nominal center wavelength is acquired from white light interference intensity signal using Fast Fourier Transform (FFT). The phase illegibility is removed to determine zero OPD position according to the coherence peak. The Computer Generated Holograms (CGH) with a depth of 1.63 μm is measured. A continuous surface of the micro lens array tested with Frequency Domain Analysis(FDA) has a PV value of 370.99 nm and a RMS value of 62.4 nm. By obtaining the position of the zero-order white light fringe, the FDA method can be used to measure the micro surface profile.