Acta Optica Sinica, Volume. 27, Issue 7, 1271(2007)
Research of an Adaptive Micro-Mirror Based on Micro-Opto-Electro-Mechanical-System
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research of an Adaptive Micro-Mirror Based on Micro-Opto-Electro-Mechanical-System[J]. Acta Optica Sinica, 2007, 27(7): 1271
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