Acta Physica Sinica, Volume. 68, Issue 23, 230201-1(2019)

Charging effect of polymer thin film under irradiation of high-energy transmission electron beam

Zhi-Sheng Huo1, Hong-Bin Pu1, and Wei-Qin Li1,2、*
Author Affiliations
  • 1School of Automation and Information Engineering, Xi’an University of Technology, Xi’an 710048, China
  • 2Department of Electronic Science and Technology, Xi’an Jiaotong University, Xi’an 710049, China
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    Figures & Tables(10)
    Interaction between high-energy electrons and PMMA thin film.高能电子与PMMA薄膜相互作用示意图
    Flow diagram of the charging process.计算流程示意图
    Simulated (lines) and experimental (squares) electron total yields.电子总产额的模拟(线条)和测量(方块)结果
    Charges distribution along the incident direction: (a) Electron density ; (b) net charge density.样品内部入射方向电荷分布 (a) 电子密度; (b) 净电荷密度
    (a) Space potential and (b) electric field along the incident direction.(a) 空间电位; (b) 电场强度沿入射方向分布
    The surface potential VS and emission current Iσ as function of time.表面电位VS和出射电子电流Iσ时变特性
    The transmission current ITE and the sample current IS as function of time.透射电流ITE和样品电流IS时变特性
    Charging characteristics under different thicknesses: (a) Surface potential; (b) surface emission current; (c) sample current; (d) transmission current.不同厚度下的带电特性 (a) 表面电位; (b) 表面出射电流; (c) 样品电流; (d) 透射电流
    Charging characteristics under different beam energies: (a) Surface potential; (b) surface emission current; (c) sample current; (d) transmission current.不同入射能量下带电特性 (a) 表面电位; (b) 表面出射电流; (c) 样品电流; (d) 透射电流
    • Table 1. Default values of parameters.

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      Table 1. Default values of parameters.

      参数取值单位
      电子束能量EB10keV
      束流0.16pA
      样品厚度H2μm
      复合率10–14cm–3·s–1
      电子迁移率μ10–10cm2·V–1·s–1
      陷阱体密度Ntrap1017cm–3
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    Zhi-Sheng Huo, Hong-Bin Pu, Wei-Qin Li. Charging effect of polymer thin film under irradiation of high-energy transmission electron beam[J]. Acta Physica Sinica, 2019, 68(23): 230201-1

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    Paper Information

    Received: Jul. 18, 2019

    Accepted: --

    Published Online: Sep. 17, 2020

    The Author Email:

    DOI:10.7498/aps.68.20191112

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