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Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 936(2022)

Finite Element Analysis of Support Column Capacitive Micromachined Ultrasonic Transducer

LI Yingtuo1,2,3, CHIN Chite1,2,3, and CHENG Chinghsiang1,2,3
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  • 1[in Chinese]
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    LI Yingtuo, CHIN Chite, CHENG Chinghsiang. Finite Element Analysis of Support Column Capacitive Micromachined Ultrasonic Transducer[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 936

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    Paper Information

    Received: Apr. 25, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.06.021

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology