Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 936(2022)

Finite Element Analysis of Support Column Capacitive Micromachined Ultrasonic Transducer

LI Yingtuo1,2,3, CHIN Chite1,2,3, and CHENG Chinghsiang1,2,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    Using COMSOL software, a simplified analysis model was established, and the finite element analysis of the support column capacitive micromachined ultrasonic transducer(CMUT) model was carried out, and it was compared with the circular cavity CMUT model. The results show that the resonance frequency of the support column CMUT model is 10 kHz and the collapse voltage is 52 V, which is suitable for the low-frequency design. Comparing the support column CMUT model with the circular cavity CMUT model, it can be seen that the former model has a larger active area, less parasitic capacitance; higher device sensitivity, lower collapse voltage, and larger amplitude of membrane, but the sound signals emitted during working will be weaker than the latter.

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    LI Yingtuo, CHIN Chite, CHENG Chinghsiang. Finite Element Analysis of Support Column Capacitive Micromachined Ultrasonic Transducer[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 936

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    Paper Information

    Received: Apr. 25, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.06.021

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