[6] [6] Cogley R M, Knight S E, Toomey T J. Measuring photoresist spectral response with a spectrosensitometer[J]. Proceedings of SPIE, 1988, 922: 212–216.

[8] [8] Walker R A. An equal-energy scanning spectrosensitometer[J]. Photographic Science and Engineering, 1970, 14(6): 421–427.

[10] [10] Banning M. Neutral density filters of chromel A[J]. Journal of the Optical Society of America, 1947, 37(9): 686–687.

[11] [11] Frenkel A, Zhang Z M. Broadband high-optical-density filters in the infrared[J]. Optics Letters, 1994, 19(18): 1495–1497.

[12] [12] Bittar A, White M G. Design of ultraviolet neutral density filters using metal-insulator inhomogeneous layers[J]. Applied Optics, 1992, 31(28): 6122–6126.

[18] [18] Dixit S A, Jain A. Implementation of PPC-SSR as final control element and interfacing of PLC with LabVIEW using modbus in two tank non interacting level control system[C]//Proceedings of the 1st IEEE International Conference on Power Electronics, Intelligent Control and Energy Systems, Delhi, India, 2016: 1–6.

[19] [19] Wang G S, Deng Y, Xie Q, et al. Design electric closed-loop of multidrive NC servo control system based on Lab-VIEW[C]//Proceedings of the IEEE 4th International Confe-rence on Digital Manufacturing & Automation, Qingdao, China, 2013: 449–452.

[20] [20] Junoh S C K, Abdullah L, Jamaludin Z, et al. Evaluation of tracking performance of NPID double hyperbolic controller de-sign for XY table ball-screw drive system[C]//Proceedings of the 11th IEEE Asian Control Conference, Gold Coast, QLD, Australia, 2017: 665–670.

[21] [21] Niranjan P, Shetty S C, Byndoor C D, et al. Friction identifica-tion and control of ball screw driven system using PLC[C]//Proceedings of 2016 IEEE International Conference On Recent Trends in Electronics, Information & Communication Technology, Bangalore, India, 2016: 803–808.