Chinese Journal of Lasers, Volume. 27, Issue 11, 1016(2000)

Study on 18~20 nm Broadband Multilayer at Normal Incidence

[in Chinese]1, [in Chinese]2, [in Chinese]1, and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(4)

    [1] [1] D. J. Nagel, J. V. Gilfrich, T. W. Barbee. Bragg diffractors with graded-thickness multilayers. Nucl. Instrum. Methods, 1982, 195:63~65

    [2] [2] J. F. Meekins, R. G. Cruddace, H. Gursky. Optimization of layered synthetic microstructures for narrowband reflectivity at soft X-ray and EUV wavelengths. Appl. Opt., 1986, 25:2757~2763

    [3] [3] S. P. Vernon, D. G. Stearns, R. S. Rosen. Chirped multilayer coatings for increased X-ray throughput. Opt. Lett., 1993, 18(9):672~674

    [5] [5] Wang Z. S., Wang Z., Chen B. et al.. Large area transmission grating spectrograph with high collecting efficiency and good spatial resolution. SPIE, 1998, 3443:137~142

    CLP Journals

    [1] HOU Li-fei, LIU Shen-ye, YI Rong-qing, DU Hua-bing, LI Chao-guang, HE Xiao-an, LI Hang, ZHU Jing-tao, ZHAO Yi-dong, CUI Ming-qi. Calibration and Amendment of Soft X-Ray Multilayer Mirror Reflectivity[J]. Acta Photonica Sinica, 2009, 38(4): 827

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on 18~20 nm Broadband Multilayer at Normal Incidence[J]. Chinese Journal of Lasers, 2000, 27(11): 1016

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    Paper Information

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    Received: Jun. 20, 1999

    Accepted: --

    Published Online: Aug. 9, 2006

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