[1] Herman P R, Marjoribanks R S, Oettl A et al. Laser shaping of photonic materials: deep-ultraviolet and ultrafast lasers[J]. Applied Surface Science, 154, 577-586(2000).

[2] Sugioka K, Akane T, Obata K et al. Multiwavelength excitation processing using F2 and KrF excimer lasers for precision microfabrication of hard materials[J]. Applied Surface Science, 197, 814-821(2002).

[3] Park C, Shin B S, Kang M S et al. Experimental study on micro-porous patterning using UV pulse laser hybrid process with chemical foaming agent[J]. International Journal of Precision Engineering and Manufacturing, 16, 1385-1390(2015).

[4] Colombelli J, Reynaud E G, Stelzer E H K. Subcellular nanosurgery with a pulsed subnanosecond UV-a laser[J]. Medical Laser Application, 20, 217-222(2005).

[5] Bilali M, Alifu S. Synchrotron radiation light source and its technical development[J]. Journal of Xinjiang Normal University (Natural Sciences Edition), 34, 53-58(2015).

[6] Sun X, Wang C L. Status and research of manual UV radiation source[J]. Electro-Optic Technology Application, 27, 8-15(2012).

[7] Jiang R. Key technologies and applications of excimer laser as light sources in lithography[J]. Laser & Optoelectronics Progress, 59, 0922020(2022).

[8] Liang X, Shen Q H, Shao J Z et al. Discharge-pumped excimer laser technologies and applications[J]. Laser & Optoelectronics Progress, 60, 1900006(2023).

[9] Wang J N, Wu Z K, Li S S. Free-electron laser and military application (Invited)[J]. Electro-Optic Technology Application, 36, 30-35(2021).

[10] Couprie M E. New generation of light sources: Present and future[J]. Journal of Electron Spectroscopy and Related Phenomena, 196, 3-13(2014).

[11] Qian L L. Generation of continuous-wave 194 nm laser by fourth harmonic generation[D](2021).

[12] Li M, Meng X, Hu J M et al. 210-250 nm tunable narrow linewidth Ti: sapphire laser[J]. Acta Photonica Sinica, 51, 0914004(2022).

[13] Su Y L, Jiang Q C. Study of All-solid-state deep-ultraviolet laser technology at 213 nm[J]. Journal of Chongqing Normal University (Natural Science), 26, 82-84(2009).

[14] Li X, Wang Y L, Zhou X G et al. High conversion efficiency of third harominc generation using femtosecond laser pulse with chirp compensation[J]. Laser & Optoelectronics Progress, 45, 73-77(2008).

[15] Li S Y, Han X Y, Ren Y Z et al. Gaussian beam with the center beam power and amplitude and the electric field intensity distribution relationship[J]. Journal of Henan Normal University (Natural Science Edition), 36, 60-62(2008).

[16] Yao J Q, Xu D G[M]. All solid state laser and nonlinear optical frequency conversion technology(2007).

[17] Kouta H, Kuwano Y. Attaining 186-nm light generation in cooled β -BaB2O4 crystal[J]. Optics Letters, 24, 1230-1232(1999).

[18] Zeng R, Shen X L, Li C S et al. Optical electric-field sensor using single β-BaB2O4 crystal[J]. Proceedings of SPIE, 8421, 84212U(2012).

[19] Zhao Z G, Xuan H W, Wang J C et al. Research progresses on vacuum-ultraviolet 193-nm band solid-state lasers[J]. Acta Optica Sinica, 42, 1134010(2022).

[20] Kurdi G, Osvay K, Klebniczki J et al. Two-photon-absorption of BBO, CLBO, KDP and LTB crystals[C], MF18(2005).