Acta Optica Sinica, Volume. 34, Issue 4, 405003(2014)
Effect of Measured Interference Fringe Period Error on Groove Profile of Grating Masks in Scanning Beam Interference Lithography System
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Jiang Shan, Bayanheshig, Song Ying, Pan Mingzhong, Li Wenhao. Effect of Measured Interference Fringe Period Error on Groove Profile of Grating Masks in Scanning Beam Interference Lithography System[J]. Acta Optica Sinica, 2014, 34(4): 405003
Paper Information
Category: Diffraction and Gratings
Received: Sep. 4, 2013
Accepted: --
Published Online: Mar. 25, 2014
The Author Email: Shan Jiang (jiangshan0122@126.com)
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