Acta Optica Sinica, Volume. 30, Issue 1, 294(2010)
Effects of Annealing Treatment on Photoluminescence of LaAlO3 Thin Films
[1] [1] Xin Luo,Biao Wang. Structural and elastic properties of LaAlO3 from first-principles calculations [J]. J. Appl. Phys.,2008,104(7):073518-1-073518-7
[2] [2] P. W. Peacock,J. Robertson. Bonding energies and band offsets of Si-ZrO2 and HfO2 gate oxide interfaces [J]. Phys. Rev. Lett.,2004,92(5):057601-1-057601-4
[3] [3] A. Uedono,S. Inumiya,T. Matsuki et al.. Vacancy-fluorine complexes and their impact on the properties of metal-oxide transistors with high-k gate dielectrics studiedusing monoenergetic positron beams [J]. J. Appl. Phys.,2007,102(5):054511-1-054511-7
[4] [4] B. C. Chakoumakos,D. G. Scholm,M. Urbanik et al.. Thermal expansion of LaAlO3 and (La,Sr) (Al,Ta)O3,substrate materials for superconducting thin-film device applications [J]. J. Appl. Phys.,1998,83(4):1979-1982
[5] [5] G. D. Wilk,R. M. Wallace,J. M. Anthony. High-k gate dielectrics:current status and materials properties considerations [J]. J. Appl. Phys.,2001,89(10):5243-5275
[6] [6] Javier Junquera,Philippe Ghosez. Critical thickness for ferroelectricity in perovskite ultrathin films [J]. Nature,2003,422(6931):506-509
[7] [7] L. Becerra,C. Merckling,N. Baboux et al.. Ultralow equivalent oxide thickness obtained for thin amorphous LaAlO3 layers grown on Si (001) [J]. Appl. Phys. Lett.,2007,91(19):192909-1-192909-3
[8] [8] Seung-Gu Lim,Stas Kriventsov,Thomas N. Jackon et al.. Dielectric functions and optical bandgaps of high-k dielectrics for metal-oxide-semiconductor field-effect transistors by far ultraviolet spectroscopic ellipsometry [J]. J. Appl. Phys.,2002,91(7):4500-4505
[9] [9] Angus I. Kingon,Jon-Paul Maria,S. K. Streiffer. Alternative dielectrics to silicon dioxide for memory and logic devices [J]. Nature,2000,406(6799):1032-1038
[10] [10] Prezemyslaw J. Deren. Spectroscpic characterization of LaAlO3 crystal doped with Pr3+ ions [J]. J. Lumin.,2007,122-123:40-43
[11] [11] P. J. Deren,R. Mahiou. Spectroscopic characterization of LaAlO3 crystal doped with Er3+ ions [J]. Opt. Mater.,2007,29(7):766-772
[12] [12] Vijay Singh,D. T. Naidu,R. P. S Chakradhar et al.. Synthesis,characterization and optical properties of LaAlO3:Ho3+ phosphor [J]. Physica B,2008,403(19-20):3781-3785
[13] [13] A. Gocalinska,P. J. Deren,P. Gluchowski et al.. Spectroscopic characterization of LaAlO3 crystal doped with Tm3+ ions [J]. Opt. Mater.,2008,30(5):680-683
[14] [14] Byung-Eun Park,Hiroshi Ishiwara. Formation of LaAlO3 films on Si (100) substrates using molecular beam deposition [J]. Appl. Phys. Lett.,2003,82(8):1197-1199
[15] [15] L. F. Edge,D. G. Schlom,R. T. Brewer et al.. Suppression of subcutaneous oxidation during the deposition of amorphous lanthanum aluminate on silicon [J]. Appl. Phys. Lett.,2004,84(23):4629-4631
[16] [16] L. Miotii,P. Bastos,C. Driemeier et al.. Effects of post-deposition annealing in O2 on the electrical characteristics of LaAlO3 films on Si [J]. Appl. Phys. Lett.,2005,87(2):022901-1-022901-3
[17] [17] Ai-Dong Li,Qi-Yue Shao,Hui-Qin Ling et al.. Characteristics of LaAlO3 gate dielectrics on Si grown by metalorganic chemical vapor deposition [J]. Appl. Phys. Lett.,2003,83(17):3540-3542
[18] [18] X. B. Lu,Z. G. Liu,G. H. Shi et al.. Interfacial structures of LaAlO3 films on Si (100) substrates [J]. Appl. Phys. A,2004,78(6):921-923
[21] [21] Wang Dongsheng,Yu Tao,You Biao et al.. Properties of high-k gate dielectric LaAlO3 thin films [J]. J. Inorganic Materials,2003,18(1):229-232
[24] [24] K. Xiong,J. Robertson,S. J. Clark. Defect states in the high-dielectric-constant gate oxide LaAlO3[J]. Appl. Phys. Lett.,2006,89(2):022907-1-022907-3
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Du Jianzhou, Wang Dongsheng, Gu Zhigang, Zhao Zhimin, Chen Hui, Yang Shibo, Li Yongxiang. Effects of Annealing Treatment on Photoluminescence of LaAlO3 Thin Films[J]. Acta Optica Sinica, 2010, 30(1): 294
Category: Thin Films
Received: Apr. 24, 2009
Accepted: --
Published Online: Feb. 1, 2010
The Author Email: Jianzhou Du (dujianzhou123@nuaa.edu.cn)