Acta Photonica Sinica, Volume. 52, Issue 7, 0752306(2023)

Narrow Pulse Width Laser Induced Reverse Selective Removal of Metal Thin Films to Fabricate Microcircuits(Invited)

Jiaqi CUI1, Xiaozhu XIE2,3、*, Yajun HUANG2, Zhaoyan LI2, Yuhang LUO2, and Jiangyou LONG2
Author Affiliations
  • 1School of Physics and Optoelectronic Engineering,Guangdong University of Technology,Guangzhou 510006,China
  • 2Laser Micro/Nano Processing Lab,School of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China
  • 3Department of Experiment Teaching,Guangdong University of Technology,Guangzhou 510006,China
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    Jiaqi CUI, Xiaozhu XIE, Yajun HUANG, Zhaoyan LI, Yuhang LUO, Jiangyou LONG. Narrow Pulse Width Laser Induced Reverse Selective Removal of Metal Thin Films to Fabricate Microcircuits(Invited)[J]. Acta Photonica Sinica, 2023, 52(7): 0752306

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    Paper Information

    Category:

    Received: Apr. 10, 2023

    Accepted: May. 15, 2023

    Published Online: Sep. 26, 2023

    The Author Email: Xiaozhu XIE (xiaozhuxie@gdut.edu.cn)

    DOI:10.3788/gzxb20235207.0752306

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