[1] [1] S. Schiller, U. Heisig, and S. Panzer, Electron Beam Technology (John Wiley & Sons, New York, 1982).

[2] [2] X. Xiao, G. Dong, H. He, H. Qi, Z. Fan, and J. Shao, Chin. Opt. Lett. 7, 967 (2009).

[3] [3] Y. Shen, Z. Han, J. Shao, S. Shao, and H. He, Chin. Opt. Lett. 6, 225 (2008).

[4] [4] B. Xu, M. Gevelber, D. Smith, G. Reimann, and J. Bellum, in Society of Vacuum Coaters, 49th Annual Technical Conference Proceedings 319 (2006).

[5] [5] M. Ohring, Materials Science of Thin Films: Deposition and Structure (Academic Press, San Diego, 2002).

[6] [6] R. L. Shrader and K. N. Tsujimoto, "Vapor source assembly" US Patent 3710072 (1973).

[7] [7] A. Powell, P. Minson, G. Trapaga, and U. Pal, Metallurgical and Materials Transactions A 32, 1959 (2001).

[8] [8] R. J. Hill and P. A. J. Smith, "Electron beam gun for use in an electron beam evaporation source" US Patent 5182488 (1993).

[9] [9] A. O. DuBois, H. R. Harker, and C. W. Hanks, "Electron beam furnace" US Patent 3132198 (1962).

[10] [10] R. Chow and N. Tsujimoto, Appl. Opt. 35, 5095 (1996).