Spectral Confocal Displacement Measurement Method Based on SNV Correction of Surface Roughness

Roughness parameter Rq/nm	Theoretical value z₀/mm	Measured value z/mm	Corrected measured value z'/mm	Error before correction Δz/μm	Error after correction Δz'/μm
	1.017 6	1.012 7	1.017 4	4.9	0.2
	1.109 7	1.104 6	1.109 6	5.1	0.1
	1.089 6	1.084 4	1.089 3	5.2	0.3
	1.095 7	1.089 4	1.095 6	6.3	0.1
15	1.106 7	1.100 3	1.106 4	6.4	0.3
	0.995 4	0.989 0	0.994 5	6.4	0.9
	1.060 1	1.052 6	1.059 1	7.5	1.0
	1.132 7	1.125 2	1.131 3	7.5	1.4
	1.145 7	1.137 6	1.144 4	8.1	1.3
	0.998 7	0.990 6	0.997 3	8.1	1.4
	1.057 5	1.049 2	1.055 6	8.3	1.9
	1.016 2	1.007 9	1.015 1	8.3	1.1
25	1.133 9	1.125 2	1.131 9	8.7	2.0
	1.097 7	1.088 5	1.095 9	9.2	1.8
	1.108 7	1.099 4	1.106 4	9.3	2.3
	1.050 5	1.040 9	1.049 5	9.6	1.0
	0.871 2	0.861 1	0.869 9	10.1	1.3
	1.061 7	1.051 1	1.059 6	10.6	2.1
	1.138 1	1.127 2	1.136 9	10.9	1.2
	1.143 4	1.132 3	1.142 1	11.1	1.3
35	1.142 3	1.130 2	1.140 9	12.1	1.4
	1.016 5	1.004 1	1.014 7	12.4	1.8
	0.729 6	0.716 8	0.726 9	12.8	2.7
	0.881 1	0.864 4	0.877 2	16.7	3.9

Table 2. Comparing experimental measurement results
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Table 2. Comparing experimental measurement results
Roughness parameter
Rq/nm
Direct
measurement maximum error/μm
Direct measurement
average error/μm
Maximum
error after correction/μm
Corrected average error/μm
10 4.3 4.1 0.4 0.2
20 7.9 7.6 1.4 1.2
30 10.0 9.8 1.6 1.3

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Chunyan LI, Wenwen FU, Jihong LIU, Danlin LI, Shaojie WU, Ninglin WANG, Kaili REN. Spectral Confocal Displacement Measurement Method Based on SNV Correction of Surface Roughness[J]. Acta Photonica Sinica, 2025, 54(4): 0412002

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