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Chinese Journal of Lasers, Volume. 44, Issue 12, 1204006(2017)

Alignment Technique Using Moire Fringes Based on Self-Coherence in Lithographic Tools

Du Juyou1,2, Dai Fengzhao1,2, Bu Yang1,2, and Wang Xiangzhao1,2、*
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    Du Juyou, Dai Fengzhao, Bu Yang, Wang Xiangzhao. Alignment Technique Using Moire Fringes Based on Self-Coherence in Lithographic Tools[J]. Chinese Journal of Lasers, 2017, 44(12): 1204006

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    Paper Information

    Category: measurement and metrology

    Received: Jul. 4, 2017

    Accepted: --

    Published Online: Dec. 11, 2017

    The Author Email: Xiangzhao Wang (wxz26267@siom.ac.cn)

    DOI:10.3788/cjl201744.1204006

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology