Fig. 1. Schematic diagram of design of mode-localized metasurface infrared thermal detector. (a) Overall structural design of mode-localized micromechanical infrared detector; (b) side view of metasurface absorber unit structure; (c) top view of metasurface absorber unit structure

Fig. 2. Absorption performance of MIM structure metasurface absorber. (a) MIM metasurface of cross 1 structure; (b) MIM metasurface of cross 2 structure; (c) absorption spectra of TE wave incidence for cross-structure of cross 1 structure and cross 2 structure

Fig. 3. Electromagnetic field distributions at absorption peaks of metasurface absorber under TE wave incidence. (a) Electromagnetic field distributions corresponding to p₁; (b) electromagnetic field distributions corresponding to p₂; (c) electromagnetic field distributions corresponding to p₃

Fig. 4. Simulation results of electromagnetic wave absorption at different incident angles. (a) Influence of incident angle on absorption under TE wave incidence; (b) influence of incident angle on absorption under TM wave incidence

Fig. 5. Physical model and numerical calculation results of weakly coupled resonant system. (a) Equivalent mechanical model of “mass-stiffness-damping” system in two-degree-of-freedom weakly coupled resonator system; (b) first vibration mode (in-phase) and second vibration mode (out-of-phase); (c) amplitude-frequency curves of the first and second vibration modes under different perturbations

Fig. 6. Infrared light power response characteristics of resonators. (a) Amplitude ratio output and frequency output characteristic curves of resonator under photothermal perturbation; (b) resonator sensing characteristic curves under the first and second resonance modes