Piezoelectrics & Acoustooptics, Volume. 44, Issue 1, 26(2022)
FEM Simulation Study on Single Crystalline LN BAW Resonator
[1] [1] ROESSLER A.Impact of spectrum sharing on 4G and 5G standards a review of how coexistance and spectrum sharing is shaping 3GPP standards[C]//Washington,DC,USA:2017 IEEE International Symposium on Electromagnetic Compatibility & Signal/Power Integrity (EMCSI),2017:704-707.
[2] [2] PARK J,JEONG M,HUSSAIN N,et al.A low-profile high-gain filtering antenna for fifth generation systems based on nonuniform metasurface[J].Microwave and Optical Technology Letters,2019,61(11):2513-2519.
[3] [3] LIU L,FU Q,LIANG F,et al.Dual-band filter based on air-filled SIW cavity for 5G application[J].Microwave and Optical Technology Letters,2019,61(11):2599-2606.
[4] [4] CHAUHAN V,HUCK C,FRANK A,et al.Enhancing RF bulk acoustic wave devices:Multiphysical modeling and performance[J].IEEE Microwave Magazine,2019, 20(10):56-70.
[5] [5] GAO Y,CAI X,HE X.Four-step FBAR filters design method and SOI BOX buffered via-hole etching scheme[C]//Hangzhou,China:2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT),2016:1131-1136.
[6] [6] XIANG B X,GUAN J,JIAO Y,et al.Fabrication of ion-sliced lithium niobate slabs using helium ion implantation and Cu-Sn bonding:Fabrication of ion-sliced lithium niobate slabs[J].Physica Status Solidi(A),2014,211(10):2416-2420.
[7] [7] CHEN L,NAGY J,REANO R M.Patterned ion-sliced lithium niobate for hybrid photonic integration on silicon[J].Optical Materials Express,2016,6(7):2460.
[8] [8] BARON T, LEBRASSEUR E, BASSIGNOT F,et al. Wideband lithium niobate FBAR filters[J]. International Journal of Microwave Science and Technology,2013:459767.
[9] [9] THALHAMMER R, AIGNER R.Energy loss mechanisms in SMR-type BAW devices[C]//[S.l.]:IEEE MTT-S International Microwave Symposium Digest,2005.
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ZHANG Yi, SUN Yanlong. FEM Simulation Study on Single Crystalline LN BAW Resonator[J]. Piezoelectrics & Acoustooptics, 2022, 44(1): 26
Received: Aug. 26, 2021
Accepted: --
Published Online: Mar. 16, 2022
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