Piezoelectrics & Acoustooptics, Volume. 44, Issue 1, 26(2022)

FEM Simulation Study on Single Crystalline LN BAW Resonator

ZHANG Yi1 and SUN Yanlong2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(9)

    [1] [1] ROESSLER A.Impact of spectrum sharing on 4G and 5G standards a review of how coexistance and spectrum sharing is shaping 3GPP standards[C]//Washington,DC,USA:2017 IEEE International Symposium on Electromagnetic Compatibility & Signal/Power Integrity (EMCSI),2017:704-707.

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    [3] [3] LIU L,FU Q,LIANG F,et al.Dual-band filter based on air-filled SIW cavity for 5G application[J].Microwave and Optical Technology Letters,2019,61(11):2599-2606.

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    [5] [5] GAO Y,CAI X,HE X.Four-step FBAR filters design method and SOI BOX buffered via-hole etching scheme[C]//Hangzhou,China:2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT),2016:1131-1136.

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    [7] [7] CHEN L,NAGY J,REANO R M.Patterned ion-sliced lithium niobate for hybrid photonic integration on silicon[J].Optical Materials Express,2016,6(7):2460.

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    [9] [9] THALHAMMER R, AIGNER R.Energy loss mechanisms in SMR-type BAW devices[C]//[S.l.]:IEEE MTT-S International Microwave Symposium Digest,2005.

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    ZHANG Yi, SUN Yanlong. FEM Simulation Study on Single Crystalline LN BAW Resonator[J]. Piezoelectrics & Acoustooptics, 2022, 44(1): 26

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    Paper Information

    Received: Aug. 26, 2021

    Accepted: --

    Published Online: Mar. 16, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.01.006

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