Chinese Journal of Lasers, Volume. 48, Issue 15, 1504001(2021)

Precision Measurement and Applications of Laser Interferometry

Yidong Tan*, Xin Xu, and Shulian Zhang
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing 100084, China
  • show less
    Figures & Tables(36)
    Principle of dual-frequency laser generation[10]. (a) Acousto-optic frequency-shift; (b) dual longitudinal modes to select the frequency
    Zeeman-birefringence dual-frequency laser[10]
    Frequency stabilization via equal intensity method
    Frequency difference drift in a long period
    The schematic of dual-frequency interference
    Drift test results for designed dual-frequency laser interferometers
    70 m linearity test in National Institute of Metrology, China
    70 m linearity test results of Zeeman-birefringence dual-frequency laser interferometer. (a) Linearity; (b) measurement errors
    Measuring device of nonlinear errors
    Comparison of nonlinear errors of two dual-frequency laser interferometer[32]. (a) Agilent dual-frequency laser interferometer; (b) Zeeman-birefringence dual-frequency laser interferometer
    Precise measurement applications with Zeeman-birefringence dual-frequency laser interferometer. (a) Test of satellite electric propulsion system; (b) CNC machine calibration; (c) coordinate measuring machine calibration
    Zeeman-birefringence dual-frequency laser used in Nikon NSR mask aligner
    Zeeman-birefringence dual-frequency laser interferometer
    The schematic of three-mirror model for laser feedback interferometry[46]
    Schematic of laser feedback effect. (a) Zero frequency feedback; (b) frequency-shifted feedback
    Laser frequency-shifted feedback optical system
    Output characteristics of solid-state microchip laser. (a) Fundamental transverse and longitudinal mode; (b) wavelength and power stability
    Laser power spectra under different feedback levels. (a)--(c) Simulation results; (d)--(f) experimental results
    Gain function curve
    Laser frequency-shifted feedback optical system
    Flow chart of the phase demodulation of laser frequency-shifted feedback interferometer
    Test results of the laser frequency-shifted feedback interferometer. (a) Short-period drift; (b)displacement resolution
    Laser frequency-shifted feedback interferometer
    Single-spot two-dimensional displacement measurement based on laser frequency-shifted feedback interferometry[52]
    Two-dimensional displacement resolution. (a) In-plane displacement; (b) off-plane displacement
    Two-dimensional displacement test results. (a) Random motion; (b) circle motion
    Rotation measurement method based on double-beam frequency-shifted feedback interferometry
    Frequency-shifted signals[76]. (a) S1; (b) S2
    Remote eavesdropping system based on laser frequency-shifted feedback[77]
    The spectrograms of the test sound recovered in the different distances[77]. (a) Test sound spectrogram; recovered spectrograms at (b) 100 m, (c) 150 m, and (d) 200 m
    Schematic of liquid refractive index measurement[62]
    Measurement system for materials’ coefficient of thermal expansion. (a) System diagram; (b) device
    Laser confocal frequency-shifted feedback imaging system
    Two-dimensional longitudinal view of microfluidic channels. (a) LFCT system imaging result at 0.02 mW; (b) LCT system imaging result at 0.02 mW; (c) LCT system imaging result at 0.73 mW; (d) microfluidic chip structure diagram
    Laser ultrasound frequency-shifted feedback imaging system[89]
    • Table 1. Technical performance of Zeeman-birefringence dual-frequency interferometer[34]

      View table

      Table 1. Technical performance of Zeeman-birefringence dual-frequency interferometer[34]

      Technical performanceValue
      Frequency stabilization accuracy±0.03×10-6
      Vacuum wavelength632.99 nm
      Laser power>0.5 mW
      Beam diameter6 mm
      Preheat time<10 min
      Laser head size (weight)230 mm×125 mm×80 mm(2.60 kg)
      Measuring range0--80 m
      Accuracy±0.4×10-6
      Temperature range0--40 ℃
      Resolution1 nm
      Maximum speed capability2 m/s
      Dynamic acquisition frequency0.1 Hz--100 kHz
    Tools

    Get Citation

    Copy Citation Text

    Yidong Tan, Xin Xu, Shulian Zhang. Precision Measurement and Applications of Laser Interferometry[J]. Chinese Journal of Lasers, 2021, 48(15): 1504001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: measurement and metrology

    Received: Mar. 15, 2021

    Accepted: May. 6, 2021

    Published Online: Jul. 16, 2021

    The Author Email: Yidong Tan (tanyd@tsinghua.edu.cn)

    DOI:10.3788/CJL202148.1504001

    Topics