Acta Optica Sinica, Volume. 35, Issue 1, 122003(2015)
Effects and Improvements of Coating Induced Polarization Aberration on Lithography Lens Design
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Shang Hongbo, Liu Chunlai, Zhang Wei, Chen Hua′nan. Effects and Improvements of Coating Induced Polarization Aberration on Lithography Lens Design[J]. Acta Optica Sinica, 2015, 35(1): 122003
Paper Information
Category: Optical Design and Fabrication
Received: May. 26, 2014
Accepted: --
Published Online: Dec. 18, 2014
The Author Email: Shang Hongbo (silverbirchs@gmail.com)
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