Acta Optica Sinica, Volume. 35, Issue 1, 122003(2015)

Effects and Improvements of Coating Induced Polarization Aberration on Lithography Lens Design

Shang Hongbo*, Liu Chunlai, Zhang Wei, and Chen Hua′nan
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    Shang Hongbo, Liu Chunlai, Zhang Wei, Chen Hua′nan. Effects and Improvements of Coating Induced Polarization Aberration on Lithography Lens Design[J]. Acta Optica Sinica, 2015, 35(1): 122003

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    Paper Information

    Category: Optical Design and Fabrication

    Received: May. 26, 2014

    Accepted: --

    Published Online: Dec. 18, 2014

    The Author Email: Shang Hongbo (silverbirchs@gmail.com)

    DOI:10.3788/aos201535.0122003

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